Mechanical and vibrational properties of carbon nitride alloys

A comparative study of Si–C–N films on different substrates grown by RF magnetron sputtering

“…The C 1s spectra showed peaks at 285.11 eV due to C-C, 290.32 eV due to C-N and 292.57 eV due to C N ( Fig. 1(c)) [18][19][20]. The Raman spectra for all three films are exhibited in Fig.…”

“…2(b) for silicon substrates. The band with peak value at 1529 cm −1 called the G (graphitic) band, arises due to stretching of sp 2 , hybridised carbon [19][20][21][22][23]. For purely graphitic phase containing 100% sp 2 hybridised carbon the G band peak occurs at 1580 cm −1 .…”

“…The shift to lower wavenumber in this case is the indication of increase in sp 3 carbon percentage in the coating which is due to incorporation of nitrogen in the coating forming mainly amorphous silicon carbonitride (a-Si-C-N) with very small ␤-C 3 N 4 crystallites as observed in the TEM studies. The band with peak value at 1311 cm −1 is called the D (disorder) band, which arises due to small crystallite sizes, nitrogen incorporation and sp 3 hybridised carbon [19]. A band peaked at 1153 cm −1 called the T band was also observed due to stretching modes of sp 3 hybridised carbon [7].…”

Correlation of structure and hardness of rf magnetron sputtered silicon carbonitride films

“…The G peak at 1522 cm −1 is associated with E 2g zone center stretching modes of graphite while the D ͑disor-der͒ peak at 1390 cm −1 is due to A 1g breathing modes which are induced by sp 3 -bonded carbon, substitutional nitrogen atom, and limitations in the crystallite size. This D peak only occurs in graphite with small crystallites [23][24][25] which is due to the fact that disorder-induced mode corresponds to a peak in the vibrational density of states of graphite and is observed when the crystallite size is sufficiently small so that the selection rules are relaxed to allow phonons with nonzero wave vectors to contribute to the Raman spectrum. 24,25 For purely graphitic phase containing 100% sp 2 hybridized carbon, the G band peak occurs at 1580 cm −1 .…”

“…This D peak only occurs in graphite with small crystallites [23][24][25] which is due to the fact that disorder-induced mode corresponds to a peak in the vibrational density of states of graphite and is observed when the crystallite size is sufficiently small so that the selection rules are relaxed to allow phonons with nonzero wave vectors to contribute to the Raman spectrum. 24,25 For purely graphitic phase containing 100% sp 2 hybridized carbon, the G band peak occurs at 1580 cm −1 . The shift to lower wavenumber in this case is the indication of increase in sp 3 carbon percentage in the coating which is due to incorporation of nitrogen in the coating forming mainly amorphous silicon carbonitride ͑a-Siu C u N͒ with very small ␤-C 3 N 4 crystallites as observed in the TEM studies.…”