Abstract:Ga-doped ZnO films were deposited on polyethylene terephthalate (PET) substrate by dc
magnetron sputtering using a high density GZO target (doped with 6.65 wt% Ga2O3) without
substrate heating. We investigated electrical, structural, and mechanical properties of GZO films
deposited under various total gas pressures (Ptot). GZO films deposited at Ptot of 2.0 Pa showed the
lowest resistivity (2.91 x 10-2 7cm), which could be attributed to higher crystallinity of the film. Also,
this GZO film showed the lowest ch… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.