2009
DOI: 10.1016/j.tsf.2008.12.028
|View full text |Cite
|
Sign up to set email alerts
|

Mechanical and deformation behaviour of titanium diboride thin films deposited by magnetron sputtering

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

0
15
0

Year Published

2010
2010
2023
2023

Publication Types

Select...
8

Relationship

0
8

Authors

Journals

citations
Cited by 24 publications
(16 citation statements)
references
References 36 publications
0
15
0
Order By: Relevance
“…There exist three regions of hardness, namely, film only hardness H f , composite hardness response of both film and substrate H c , and finally substrate only hardness H s . 11 The composite hardness H c was calculated from the experimentally measured indentation diagonal according to the conventional Vickers method. Results of hardness measurements of the substrate coating system of the three coatings are given in Fig.…”
Section: Microhardness Measurementsmentioning
confidence: 99%
“…There exist three regions of hardness, namely, film only hardness H f , composite hardness response of both film and substrate H c , and finally substrate only hardness H s . 11 The composite hardness H c was calculated from the experimentally measured indentation diagonal according to the conventional Vickers method. Results of hardness measurements of the substrate coating system of the three coatings are given in Fig.…”
Section: Microhardness Measurementsmentioning
confidence: 99%
“…According to Todorovic et al 2 and Kryshtab et al, 3 the combination of these properties point to the use of TiB 2 thin films in wear, abrasion and oxidationresistance applications. Titanium Diboride (TiB 2 ) is a wellknown ceramic material presenting very high hardness (∼30 GPa), high wear and corrosion resistance, good thermal and electric conductivities, excellent chemical 6 Several methods have been used to deposit TiB 2 films, like DC magnetron sputtering, DC magnetron triode, RF sputtering, chemical vapour deposition, and pulsed laser deposition. 5 7 Among them, sputtering is one of the most used techniques because it yields very good quality and purity films.…”
Section: Introductionmentioning
confidence: 99%
“…5 However, this problem can be overcome by a convenient positive bias regulation and an adequate substrate temperature. Hence, Mikula et al 6 refers that TiB 2 coatings present a very interesting set of properties for machining applications, especially for cutting tools. Mishra et al 7 referred those TiB 2 coatings having an enormous potential in wear/abrasion and oxidation resistant applications, like industrial parts and surgical instruments, due to its low friction coefficient and wear rate.…”
Section: Introductionmentioning
confidence: 99%
“…Titanium diboride (TiB 2 ) is an important ceramic material owing to its good mechanical properties like high hardness and modulus, chemical stability in harsh environments and good oxidation resistance [10]. These properties make TiB 2 an excellent choice for applications in thin films as protective coatings against wear, erosion, corrosion, abrasion, etc.…”
Section: Introductionmentioning
confidence: 99%