Measurements of thickness of metal films in sandwich structures by the microwave reflection spectrum

Усанов, Д. А.; Skripal, A. V.; Abramov, A. V.; Bogolyubov, A. S.; Калинина, Н.В.

doi:10.1109/eumc.2006.281071

Cited by 9 publications

(5 citation statements)

References 3 publications

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“…To calculate the reflection S 11 and the transmission S 21 , coefficients of the electromagnetic wave at its normal incidence on an N layer structure, a matrix of wave transfer between regions with different values of wave propagation constants, can be used, similar to [15][16][17]:…”

Section: 1 Microwave Photonic Crystals: Structures With Forbidden Bmentioning

confidence: 99%

“…Computer simulations were carried to determine the possibility of using one-dimensional photonic crystals for creating matched loads. When calculating the reflection S 11 and the propagation S 21 coefficients of an electromagnetic wave, the matrix of wave transfer between regions with different values of the propagation constant of the electromagnetic wave was used, as was described in detail in [10,16,17]. During computer simulation in [2], the possibility of creating waveguide matched loads in an 8-and 3-cm wavelength bands was demonstrated.…”

Section: Application Of Microwave Photonic Crystalsmentioning

confidence: 99%

“…It is known that reflection and transmission spectra of electromagnetic radiation can be used to measure the thickness and electrical conductivity of a semiconductor in metal-semiconductor structures [15][16][17]. The sensitivity of these methods depends significantly on how much these spectra are changed under changing the values of the semiconductor parameters.…”

Section: Application Of Microwave Photonic Crystalsmentioning

confidence: 99%

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Photonic Crystal Waveguides

Усанов¹,

Skripal²

2018

Emerging Waveguide Technology

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The original results of theoretical and experimental studies and the properties of microwave one-dimensional waveguide photonic crystals have been generalized. Methods for describing the electrodynamic characteristics of photonic crystals and their relationship with the parameters of periodic structures filling the waveguides have been presented. The results of an investigation on the characteristics of microwave waveguide photonic crystals made in the form of dielectric matrices with air inclusions have been presented. The model of effective dielectric permittivity has been proposed for describing the characteristics of the investigated photonic crystals containing layers with a large number of air inclusions. New types of microwave low-dimensional waveguide photonic crystals containing periodically alternating elements that are sources of higher type waves have been described. The possibility of effective control of the amplitude-frequency characteristics of microwave photonic crystals by means of electric and magnetic fields has been analyzed. Examples of new applications of waveguide photonic crystals in the microwave range have been given: the measuring parameters of the materials and semiconductor nanostructures that play the role of the microwave photonic crystals' periodicity defect; the resonators of near-field microwave microscopes; small-sized matched loads for centimeter and millimeter wavelength ranges on the basis of microwave photonic crystals.Keywords: microwave photonic crystals, forbidden bands, defect mode, electrically controlled characteristics, measurement of micro-and nanostructures, microwave matched loads, low-dimensional photonic crystal time proposed by Keldysh [1]. Periodic semiconductor structures with predetermined parameters of layers were called semiconductor superlattices. The wide interest to the problem of their creation appeared after the article was published in 1970 by Esaki and Tsu, who proposed to make such structures by changing the doping or composition of the layers [2]. The periods in such structures had values from 5 to 20 nm. The number of layers reached several hundred.The author [3] gave the definition of photonic crystals as materials whose crystal lattice has a periodicity of the permittivity leading to the appearance of the "forbidden" frequencies range, called the photonic band gap. Yablonovich [4] and John [5] proposed to create structures with a photonic band gap, which can be considered as an optical analog of the band gap in semiconductors. In this case, the forbidden band is the frequency range in which the existence of light in the inner part of the crystal is forbidden. The type of defect or disturbance of periodicity in this instance can be different. Such structures have to be created artificially in contrast to natural crystals. In this case, the size of the basic unit element of a photonic crystal should be comparable with the light wavelength. The manufacturing of such structures involves the use of electron-beam and X-ray lithography [6].As the adva...

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Section: 1 Microwave Photonic Crystals: Structures With Forbidden Bmentioning

confidence: 99%

Section: Application Of Microwave Photonic Crystalsmentioning

confidence: 99%

Section: Application Of Microwave Photonic Crystalsmentioning

confidence: 99%

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Photonic Crystal Waveguides

Усанов¹,

Skripal²

2018

Emerging Waveguide Technology

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“…In [8], [9] it was shown that placing the "quarter-wave" dielectric layer before a metal-semiconductor or metaldielectric structure while measuring the thickness of the metal layer from electromagnetic reflection spectra allows one to increase considerably the sensitivity of the method and to broaden out the range of measurable thicknesses.…”

Section: Introductionmentioning

confidence: 99%

Measurement of the metal nanometer layer parameters on dielectric substrates using photonic crystals based on the waveguide structures with controlled irregularity in the microwave band

Усанов

Skripal

Abramov

et al. 2007

2007 European Microwave Conference

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“…Для расчета коэффициентов отражения и прохождения электромагнитной волны при ее падении на слоистую металлодиэлектрическую структуру, состоящую из N слоев, использовалась матрица передачи волны между областями с различными значениями постоянных распространения волны, подобно тому, как это было сделано в [14][15][16]:…”

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Microwave Photonic Crystals. New Application Areas

Usanov¹,

Merdanov²,

Skripal³

et al. 2015

ISUNSSP

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Приведены результаты теоретического и экспериментального обоснования возможности применения СВЧ фотонных кристаллов для создания широкополосных согласованных СВЧ-нагрузок. Показана возможность использования СВЧ фотонных кристаллов для измерения толщины и проводимости нанометровых полупроводниковых слоистых структур. Экспериментально продемонстрирована возможность электрического управления амплитудно-частотными характеристиками СВЧ фотонных кристаллов. Определены пути уменьшения размеров устройств на фотонных кристаллах. Ключевые слова: СВЧ фотонный кристалл, согласованные нагрузки, измерения толщины и электропроводности, нанометровые полупроводниковые структуры, управление амплитудно-частотными характеристиками, резонатор СВЧ-микроскопа.

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Measurements of thickness of metal films in sandwich structures by the microwave reflection spectrum

Cited by 9 publications

References 3 publications

Photonic Crystal Waveguides

Photonic Crystal Waveguides

Measurement of the metal nanometer layer parameters on dielectric substrates using photonic crystals based on the waveguide structures with controlled irregularity in the microwave band

Microwave Photonic Crystals. New Application Areas

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