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2004
DOI: 10.1117/12.563615
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Measurements of the optical constants of scandium in the 50-1300eV range

Abstract: Scandium containing multilayers have been produced with very high reflectivity in the soft x-ray spectrum. Accurate optical constants are required in order to model the multilayer reflectivity. Since there are relatively few measurements of the optical constants of Scandium in the soft x-ray region we have performed measurements over the energy range of 50-1,300 eV. Thin films of Scandium were deposited by ion-assisted magnetron sputtering at Linkoping University and DC Magnetron sputtering at CXRO. Transmissi… Show more

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Cited by 17 publications
(7 citation statements)
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References 7 publications
(6 reference statements)
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“…Other than In, a source of low-absorption materials in the present range has been found among lanthanides, and many of them have been fully characterized recently (La [23], Tb [9], Gd [12], Nd [12], Yb [24,25], Ce [26], Pr [27], Eu [28], Tm [29], and Dy [30] [31][32][33][34]. This relatively low absorption makes them candidates for their use in novel multilayer coatings.…”
Section: Multilayer Designmentioning
confidence: 99%
“…Other than In, a source of low-absorption materials in the present range has been found among lanthanides, and many of them have been fully characterized recently (La [23], Tb [9], Gd [12], Nd [12], Yb [24,25], Ce [26], Pr [27], Eu [28], Tm [29], and Dy [30] [31][32][33][34]. This relatively low absorption makes them candidates for their use in novel multilayer coatings.…”
Section: Multilayer Designmentioning
confidence: 99%
“…To obtain these measurements, thin transmission films of different thicknesses d is the calculated values [16] while the solid lines are the measured values [14]. This material is one of the materials used in tri-material multilayers described in section 1.2.3.…”
Section: Materials Selection and Measuring Atomic Scattering Factorsmentioning
confidence: 99%
“…Until recently, these materials had not been fully characterized in the extreme ultraviolet (EUV)-soft x-rays. However, an increased interest in these materials has grown with the recent characterization of La 1 , Tb 1 , Gd 2 , Nd 2 , Yb 3 , Ce 4 , Pr 5 , Eu 6 and Tm 6 and of materials with close chemical properties such as Sc 7,8,9 and Y 10 .…”
Section: Introductionmentioning
confidence: 99%