Abstract:Scandium containing multilayers have been produced with very high reflectivity in the soft x-ray spectrum. Accurate optical constants are required in order to model the multilayer reflectivity. Since there are relatively few measurements of the optical constants of Scandium in the soft x-ray region we have performed measurements over the energy range of 50-1,300 eV. Thin films of Scandium were deposited by ion-assisted magnetron sputtering at Linkoping University and DC Magnetron sputtering at CXRO. Transmissi… Show more
“…Other than In, a source of low-absorption materials in the present range has been found among lanthanides, and many of them have been fully characterized recently (La [23], Tb [9], Gd [12], Nd [12], Yb [24,25], Ce [26], Pr [27], Eu [28], Tm [29], and Dy [30] [31][32][33][34]. This relatively low absorption makes them candidates for their use in novel multilayer coatings.…”
“…Other than In, a source of low-absorption materials in the present range has been found among lanthanides, and many of them have been fully characterized recently (La [23], Tb [9], Gd [12], Nd [12], Yb [24,25], Ce [26], Pr [27], Eu [28], Tm [29], and Dy [30] [31][32][33][34]. This relatively low absorption makes them candidates for their use in novel multilayer coatings.…”
“…To obtain these measurements, thin transmission films of different thicknesses d is the calculated values [16] while the solid lines are the measured values [14]. This material is one of the materials used in tri-material multilayers described in section 1.2.3.…”
Section: Materials Selection and Measuring Atomic Scattering Factorsmentioning
The development of multilayer optics for extreme ultraviolet (EUV) radiation has led to advancements in many areas of science and technology, including materials studies, EUV lithography, water window microscopy, plasma imaging, and orbiting solar physics imaging. Recent developments in femtosecond and attosecond EUV pulse generation from sources such as high harmonic generation lasers, combined with the elemental and chemical specificity provided by EUV radiation, are opening new opportunities to study fundamental dynamic processes in materials. Critical to these efforts is the design and fabrication of multilayer optics to transport, focus, shape and image these ultra-fast pulses This thesis describes the design, fabrication, characterization, and application of v
“…Until recently, these materials had not been fully characterized in the extreme ultraviolet (EUV)-soft x-rays. However, an increased interest in these materials has grown with the recent characterization of La 1 , Tb 1 , Gd 2 , Nd 2 , Yb 3 , Ce 4 , Pr 5 , Eu 6 and Tm 6 and of materials with close chemical properties such as Sc 7,8,9 and Y 10 .…”
A summary of the research performed on the optical characterization of Sc and of several lanthanides from the visible to the soft x-rays is presented. The low absorption of these materials mainly below the O 2,3 edge (L 2,3 edge for Sc) turns them promising materials for the realization of multilayer mirrors in a spectral range in which most materials in nature absorb strongly. Thin-film samples with several thicknesses of the target material were deposited by evaporation over thin-film substrates in UHV, and their transmittance was measured in situ. A wide spectral range of direct characterization, along with extrapolations to longer and shorter wavelengths either using literature data (when available) or model predictions, enabled the development of consistent optical constants over the whole spectrum. An assortment of consistency sum rules has been used, and it was found that each of them highlights a given spectral range, which may help evaluate the consistency of each part of the combined spectrum.
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