Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm

Vidal-Dasilva, Manuela; Fernández-Perea, Mónica; Méndez, José A.; Aznárez, José A.; Larruquert, Juan I.

doi:10.1364/oe.17.022773

Cited by 16 publications

(9 citation statements)

References 38 publications

(50 reference statements)

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“…Below 65 nm, single layers of a few metals like Pt [9,10], Ir [11], and Os [12], have a relatively high reflectance of up to ~20-35% in the ~45-70 nm range. In spite of the lack of transparent materials, moderately high reflectance, narrowband multilayer coatings based on the transparency of Sc [13][14][15], Tb [16,17], Gd [18], Yb [19], Eu [20], and Mg [21] films have been developed recently.…”

Section: Introductionmentioning

confidence: 99%

High reflectance ta-C coatings in the extreme ultraviolet

et al. 2013

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The extreme ultraviolet (EUV) reflectance of amorphous tetrahedrally coordinated carbon films (ta-C) prepared by filtered cathodic vacuum arc was measured in the 30-188-nm range at near normal incidence. The measured reflectance of films grown with average ion energies in the ~70-140-eV range was significantly larger than the reflectance of a C film grown with average ion energy of ~20 eV and of C films deposited by sputtering or evaporation. The difference is attributed to a large proportion of sp 3 atom bonding in the ta-C film. This high reflectance is obtained for films deposited onto room-temperature substrates. The reflectance of ta-C films is higher than the standard singlelayer coating materials in the EUV spectral range below 130 nm. A selfconsistent set of optical constants of ta-C films was obtained with the Kramers-Krönig analysis using ellipsometry measurements in the 190-950 nm range and the EUV reflectance measurements. These optical constants allowed calculating the EUV reflectance of ta-C films at grazing incidence for applications such as free electron laser mirrors. 5962-5963 (1994). 9. G. F. Jacobus, R. P. Madden, and L. R. Canfield, "Reflecting films of platinum for the vacuum ultraviolet," J.Opt. Soc. Am. 53(9), 1084-1088 (1963). 10. W. R. Hunter, D. W. Angel, and G. Hass, "Optical properties of evaporated platinum films in the vacuum ultraviolet from 220 Å to 150 Å," J. Opt. Soc. Am. 69(12), 1695-1699 (1979). 11. G. Hass, G. F. Jacobus, and W. R. Hunter, "Optical properties of evaporated iridium in the vacuum ultraviolet from 500 Å to 2000 Å," J. Opt. Soc. Am. 57(6), 758-762 (1967). 12. J. T. Cox, G. Hass, J. B. Ramsey, and W. R. Hunter, "Reflectance and optical constants of evaporated osmium in the vacuum ultraviolet from 300 to 2000 Å," J. Opt. Soc. Am. 63(4), 435-438 (1973 Robertson, "Density, sp 3 fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy," Phys. Rev. B 62(16), 11089-11103 (2000). 32. F. Xiong, Y. Y. Wang, and R. P. H. Chang, "Complex dielectric function of amorphous diamond films deposited by pulsed-excimer-laser ablation of graphite," Phys. Rev. B Condens. Matter 48(11), 8016-8023 (1993). 33. S. Waidmann, M. Knupfer, J. Fink, B. Kleinsorge, and J. Robertson, "Electronic structure studies of undoped and nitrogen-doped tetrahedral amorphous carbon using high-resolution electron energy-loss spectroscopy," J.

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Section: Introductionmentioning

confidence: 99%

High reflectance ta-C coatings in the extreme ultraviolet

et al. 2013

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“…In addition to this, Mg/SiC possesses several other favorable properties: near-zero film stress, good spectral selectivity and thermal stability up to about 350° C [17,18]. This unique combination of properties is highly desirable for mirror multilayer coatings in solar physics instrumentation and is unmatched by any of the other multilayer material pairs operating in the > 25 nm wavelength region such as Mo/Si [19], SiC/Si [19], Sc/Si [20], B 4 C/Si [19], Al/SiC [21], other Mg-based multilayers such as Mg/Co [22], and rare-earth based multilayers [23][24][25][26]. Despite the superior optical performance of Mg/SiC multilayers in the EUV region when compared to other material pairs, their use as coatings in applications that require long-term stability, such as for example the EUV imaging telescopes aboard NASA's Solar Dynamics Observatory mission [14], has been hindered by Mg corrosion [15,27].…”

Section: Introductionmentioning

confidence: 99%

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Fernández-Perea¹,

Soufli²,

Robinson³

et al. 2012

Opt. Express

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Abstract:We have developed new, Mg/SiC multilayer coatings with corrosion barriers which can be used to efficiently and simultaneously reflect extreme ultraviolet (EUV) radiation in single or multiple narrow bands centered at wavelengths in the spectral region from 25 to 80 nm. Corrosion mitigation was attempted through the use of Al-Mg or Al thin layers. Three different multilayer design concepts were developed and deposited by magnetron sputtering and the reflectance was measured at near-normal incidence in a broad spectral range. Standard Mg/SiC multilayers were also deposited and measured for comparison. They were shown to efficiently reflect radiation at a wavelength of 76.9 nm with a peak reflectance of 40.6% at near-normal incidence, the highest experimental reflectance reported at this wavelength for a narrowband coating. The demonstration of multilayer coatings with corrosion resistance and multiple-wavelength EUV performance is of great interest in the development of mirrors for space-borne solar physics telescopes and other applications requiring long-lasting coatings with narrowband response in multiple emission lines across the EUV range.

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“…This light can be reflected by a single layer and is difficult to be filtered out by a standard multilayer mirror. For instance, the EUV telescope for solar observation has to reject certain longer wavelength emission lines 74,75 or the whole range from UV to visible light 76 to block the background. High harmonic sources require dedicated optics to select specific XUV spectral components, while rejecting the drive laser light and low orders of harmonics.…”

Section: High Spectral Purity ML Mirrorsmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm

Cited by 16 publications

References 38 publications

High reflectance ta-C coatings in the extreme ultraviolet

High reflectance ta-C coatings in the extreme ultraviolet

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

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