2019
DOI: 10.1109/jsen.2019.2893958
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Measurement of Three-Dimensional Information by Single Eddy Current Displacement Sensor

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Cited by 9 publications
(1 citation statement)
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“…However, it will increase the complexity of the system when applied in the maglev vibration isolation system [24,25]. Eddy current displacement sensors are widely used in precision instruments due to their high sensibility and reliability [26,27]. However, they have a high requirement in terms of the shape and size of the object [28].…”
Section: Introductionmentioning
confidence: 99%
“…However, it will increase the complexity of the system when applied in the maglev vibration isolation system [24,25]. Eddy current displacement sensors are widely used in precision instruments due to their high sensibility and reliability [26,27]. However, they have a high requirement in terms of the shape and size of the object [28].…”
Section: Introductionmentioning
confidence: 99%