Measurement of the Thermal Conductivity and Heat Capacity of Freestanding Shape Memory Thin Films Using the 3ω Method

Jain, Ankur; Goodson, Kenneth E.

doi:10.1115/1.2945904

Cited by 121 publications

(65 citation statements)

References 35 publications

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“…The thermal conductivity of the silicon nitride membrane has been measured between 100 and 330 K. The results for a 100 nm thick silicon nitride membrane are shown in the increased, a usual trend reported in the literature for amorphous silicon nitride films [22,23].…”

Section: B Thermal Conductivity Of Sin Membranementioning

confidence: 59%

“…The need for precise measurement of very thin films or membranes imposes to work with suspended systems. However, very few techniques permits such achievement on membrane and nanowire [16,[23][24][25], especially when a high sensitivity is necessary. Here we report on a very sensitive dynamic method based on a mix of the Völklein and the 3ω methods to measure the in-plane thermal conductance of membranes.…”

Section: Introductionmentioning

confidence: 99%

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Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3ω-Völklein method

Sikora

Ftouni

Richard

et al. 2012

Review of Scientific Instruments

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A suspended system for measuring the thermal properties of membranes is presented. The sensitive thermal measurement is based on the 3ω dynamic method coupled to a Völklein geometry. The device obtained using micro-machining processes allows the measurement of the in-plane thermal conductivity of a membrane with a sensitivity of less than 10nW/K (+/-5×10 −3 Wm −1 K −1 at room temperature) and a very high resolution (∆K/K = 10 −3 ). A transducer (heater/thermometer) centered on the membrane is used to create an oscillation of the heat flux and to measure the temperature oscillation at the third harmonic using a Wheatstone bridge set-up. Power as low as 0.1nanoWatt has been measured at room temperature. The method has been applied to measure thermal properties of low stress silicon nitride and polycrystalline diamond membranes with thickness ranging from 100 nm to 400 nm. The thermal conductivity measured on the polycrystalline diamond membrane support a significant grain size effect on the thermal transport.

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Section: B Thermal Conductivity Of Sin Membranementioning

confidence: 59%

Section: Introductionmentioning

confidence: 99%

Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3ω-Völklein method

Sikora

Ftouni

Richard

et al. 2012

Review of Scientific Instruments

View full text Add to dashboard Cite

show abstract

“…It was possible to match the measured membrane temperatures by varying the thermal conductivity, which is size dependent for thin films (Liang and Li, 2006), of the membrane within the range of values found in the literature between (4.9 ± 0.7) W/(m K) (Jain and Goodson, 2008) and 15 W/(m K) (kyocera.com, 2017), whereas a thermal conductivity of (8.0 ± 0.1) W/mK gave the best agreement (see Figure 3).…”

Section: Temperatures Of the Membrane And Framementioning

confidence: 99%

Effect of Stress and Temperature on the Optical Properties of Silicon Nitride Membranes at 1,550 nm

et al. 2018

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Future gravitational-wave detectors operated at cryogenic temperatures are expected to be limited by thermal noise of the highly reflective mirror coatings. Silicon nitride is an interesting material for such coatings as it shows very low mechanical loss, a property related to low thermal noise, which is known to further decrease under stress. Low optical absorption is also required to maintain the low mirror temperature. Here, we investigate the effect of stress on the optical properties at 1,550 nm of silicon nitride membranes attached to a silicon frame. Our approach includes the measurement of the thermal expansion coefficient and the thermal conductivity of the membranes. The membrane and frame temperatures are varied, and translated into a change in stress using finite element modeling. The resulting product of the optical absorption and thermo-optic coefficient (dn/dT) is measured using photothermal common-path interferometry.

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“…This work is an extension of the recently proposed device to measure the thermal conductivity [17][18][19] . The major advantage of the proposed technique comes from the concomitant measurement of the two important thermal properties of materials: the thermal conductivity (k) and the specific heat (c) by the measurement at different thermal excitation frequencies on the same sample; low frequency for k and high frequency for c. Although less sensitive, this technique offers possibilities that cannot be obtained easily from classical specific heat measurement like ac calorimetry [20][21][22] , fast scanning calorimetry 23 or relaxation calorimetry 10 .…”

Section: Introductionmentioning

confidence: 99%

Specific heat measurement of thin suspended SiN membrane from 8 K to 300 K using the 3ω-Völklein method

Ftouni

Tainoff

Richard

et al. 2013

Review of Scientific Instruments

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We present a specific heat measurement technique adapted to thin or very thin suspended membranes from low temperature (8 K) to 300 K. The presented device allows the measurement of the heat capacity of a 70 ng silicon nitride membrane (50 or 100 nm thick), corresponding to a heat capacity of 1.4x10 −10 J/K at 8 K and 5.1x10 −8 J/K at 300 K. Measurements are performed using the 3ω method coupled to the Völklein geometry. This configuration allows the measurement of both specific heat and thermal conductivity within the same experiment. A transducer (heater/thermometer) is used to create an oscillation of the heat flux on the membrane; the voltage oscillation appearing at the third harmonic which contains the thermal information is measured using a Wheatstone bridge set-up. The heat capacity measurement is performed by measuring the variation of the 3ω voltage over a wide frequency range and by fitting the experimental data using a thermal model adapted to the heat transfer across the membrane. The experimental data are compared to a regular Debye model; the specific heat exhibits features commonly seen for glasses at low temperature. 1 arXiv:1511.07606v1 [cond-mat.mes-hall]

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Measurement of the Thermal Conductivity and Heat Capacity of Freestanding Shape Memory Thin Films Using the 3ω Method

Cited by 121 publications

References 35 publications

Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3ω-Völklein method

Highly sensitive thermal conductivity measurements of suspended membranes (SiN and diamond) using a 3ω-Völklein method

Effect of Stress and Temperature on the Optical Properties of Silicon Nitride Membranes at 1,550 nm

Specific heat measurement of thin suspended SiN membrane from 8 K to 300 K using the 3ω-Völklein method

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