2002
DOI: 10.1016/s0042-207x(02)00222-1
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Measurement of the pressure differences in a large chamber where the pressure is generated dynamically

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Cited by 8 publications
(8 citation statements)
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“…According to Jitschin and Reich [2], in common vacuum metrology the Maxwellian distribution can be applied for deriving pressures in the molecular regime with high accuracy. Pressure differences of the order of a few percent between various positions for gauges were also measured experimentally by Repa et al [3] and Peksa et al [4] in the pressure range from 10 À3 to 10 À1 Pa. They used a spinning rotor gauge (SRG) and two ionization gauges for the pressure measurements during their experiments.…”
Section: Introductionmentioning
confidence: 88%
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“…According to Jitschin and Reich [2], in common vacuum metrology the Maxwellian distribution can be applied for deriving pressures in the molecular regime with high accuracy. Pressure differences of the order of a few percent between various positions for gauges were also measured experimentally by Repa et al [3] and Peksa et al [4] in the pressure range from 10 À3 to 10 À1 Pa. They used a spinning rotor gauge (SRG) and two ionization gauges for the pressure measurements during their experiments.…”
Section: Introductionmentioning
confidence: 88%
“…If the readings of CDG 1 A are q 1 times higher than CDG 3 E and Dp greater; where q 1 is the ratio between pressures of these CDGs then [4],…”
Section: Theory and Data Analysismentioning
confidence: 99%
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“…The apparatus was based on equipment (pumped by rotary and turbomolecular pump) that enabled exact adjustment of a stable working pressure in the dynamic regime that was used in other experiments for metrology purposes [17,18]. We utilized the possibility of exact adjustment of the pressure to determine whether various values of the working pressure could affect the results of the experiment (e.g., influence of residual gas ionization on measured currents).…”
Section: Methodsmentioning
confidence: 99%
“…In order to suppress the influence of sources of non-equilibrium and pressure nonuniformity, the chamber has to have a suitable shape, it has to be sufficiently large, the gas after admission should be scattered by impinging on the walls, etc [8]. The stream of gas is scattered in order to achieve a uniform pressure distribution [2].…”
Section: ⅰ Introductionmentioning
confidence: 99%