Measurement of electric-field intensities using scanning near-field microwave microscopy

Abstract

Abstract-In this paper, we propose methods for the measurement of electric intensities of a microwave field above the surface of microwave circuits. Using miniaturized coaxial antennas, we measure all spatial components of the induced field above device-under-test. A special position/signal difference method is used to better localize the measured field and increase the spatial resolution of the field mapping. During the scanning process, the antenna is driven at the defined distance above the sample surface according to previously acquired topographic data. For measurement of the tangential-field components parallel to the sample surface, the antenna is tilted by approximately 45 relative to the sample surface. By its rotation about the vertical axis, various components of the field are measured, and vertical and horizontal electric-field intensities are recalculated. The probes are calibrated in a well-defined field standard and allow good quantitative characterization of the measured field.Index Terms-Coaxial antennas, near-field measurements, scanning near-field microscopy.

A novel high resolution E-field microscope system with applications in HPA diagnostics

“…The use of such a retracted configuration is an important novel feature of the probe design, and differentiates it from previously published work in this area [2].…”

“…The basis of the EFP is an open-ended co-axial transmission line, which can be shown to have an increasingly sharp radiation pattern as the inner conductor is retracted inside the outer sleeve [2]. The use of such a retracted configuration is an important novel feature of the probe design, and differentiates it from previously published work in this area [2].…”

Improved position-signal-difference electric near-field measurements based on fringe capacitance model

“…1, at 0.1-mm steps. The measurements were performed at various probe heights to obtain the PSD-processed result I PSD based on the following definition of PSD [4].…”

“…A number of works on miniaturized probes have been reported so far in order to create a finer resolution [3]. As an alternative way, PSD and DPSD are helpful methods for obtaining finer or required spatial resolutions without needing to fabricate a miniaturized probe [4,5]. However, no work has been conducted to clarify the quantitative description of the spatial resolution with respect to the PSD method.…”

Double position-signal-difference method for electric near-field measurements

“…In addition, miniaturized probes such as those fabricated using semiconductor processes are difficult to manufacture. To overcome these difficulties, the probe/signal difference (PSD) method proposed by Kantor and Shvets can be used [14][15]. This method achieves higher spatial resolution by subtracting measurement results obtained at two different probe heights above the target surface.…”