2007
DOI: 10.1080/15599610701548803
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Measurement of Aperture Areas Using an Optical Coordinate Measuring Machine

Abstract: The use of an optical coordinate measuring machine (CMM) for the diameter measurement of optical apertures is described. The traceability and mechanical stability of the aperture areas are of importance for accurate photometric and radiometric measurements. Detailed evaluation of the measurement uncertainty for the aperture diameter is presented. High-accuracy mechanical CMM was used to confirm the validity of the optical CMM results. The difference between the contact and non-contact measurement was 0.1 mm fo… Show more

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Cited by 11 publications
(12 citation statements)
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References 16 publications
(16 reference statements)
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“…The deviations from an ideal circle have the same order of magnitude as the edge roughness of high quality apertures, which is in the scale of few micrometers [23,24]. As described by Eq.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…The deviations from an ideal circle have the same order of magnitude as the edge roughness of high quality apertures, which is in the scale of few micrometers [23,24]. As described by Eq.…”
Section: Discussionmentioning
confidence: 99%
“…Several methods for determining the area of an aperture have been developed, which utilize either mechanical contact [16,17] or optical techniques [18][19][20][21][22][23][24][25]. In addition, a spatially uniform irradiance source can be used to compare the area of two apertures [16,26,27].…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand increasing the intensity of light above a certain value will produce a distorted image since overloaded pixels will cause an apparent increase of the bright features. This effect can cause variations of the measured feature dimensions of the order of 1 µm [5] . An overloaded image can come also from a too high CCD camera gain.…”
Section: Uncertainty Sources In Vision Systemsmentioning
confidence: 99%
“…The accuracies of vision systems reported in the literature range from 0.8 µm to 6 µm [1], [2] and their uncertainty for specific tasks is still an issue. In our research we have focused on investigating the uncertainty sources of VIScan, in particular for the task of line-width measurement which is one of the most challenging applications in vision systems [3], [4], [5] .…”
Section: Introductionmentioning
confidence: 99%
“…Por meio do sistema de medição óptica em máquinas de medir por coordenadas (Hemming et al, 2007) ou de medição por não-contato, é possível determinar precisamente a área de um objeto, por meio de detectores de imagens.…”
Section: Métodos De Transferência De Planos Guiasunclassified