Measurement of absolute distance employing a tunable CW dye laser

Ikezawa, K.; Isozaki, Katsumi; Ogita, E.; Ueda, T.

doi:10.1109/19.126627

Cited by 8 publications

(4 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A light source must have wide wavelength tunability (more than 5%). a high accuracy and a high resolution to set wavelengths and a narrow spectral line width [7]. A dye laser has all these characteristics.…”

Section: The Absolute Distance Measurement Systemmentioning

confidence: 99%

Process in absolute distance measurement using a dye laser

et al. 1995

View full text Add to dashboard Cite

We have developed a system to measure absolute distance. By stabilizing the output direction of dye laser, improving the accuracy of the wavelength and reducing the non-linear errors caused by stray beams, an accuracy of fl.3 nm and a resolution of 0.2 nm were obtained for a range of 100 mm. setting synthetic wavelengths in a geometric ratio to minimize the number of output wavelengths within a range to be measured, became possible and greatly extended the range. Our proposal seems to be an original one.In our system, as wavelengths could be set free, a systematic procedure, i.e.,

show abstract

Section: The Absolute Distance Measurement Systemmentioning

confidence: 99%

Process in absolute distance measurement using a dye laser

et al. 1995

View full text Add to dashboard Cite

show abstract

“…A different set of sources with a smaller but sufficient UMR might be more suitable if it maintains that UMR as measurement noise increases. An alternative analysis of the same experimental technique considers the synthetic wavelengths of beat notes between pairs of interference signals, keeping the range of plausible measurement results within one synthetic fringe period for each of a series of successively shorter synthetic wavelengths until the target resolution is reached [9][10][11][12]. One can then calculate bounds on the allowable measurement noise to prevent cascading (synthetic) fringe-order errors at each stage.…”

Section: Introductionmentioning

confidence: 99%

Choosing wavelengths and assessing blunder risk for the method of exact fractions

Leroux¹

2021

Metrologia

View full text Add to dashboard Cite

We revisit the problem of choosing combinations of sources for multi-wavelength interferometry, using the risk of assigning the wrong integer interference order to a measured phase as a quantitative criterion. We model this risk, explicitly accounting for the experimenter's ability to reject implausible measurement results. We present a general reliability limit for the method of exact fractions, which can be used as a benchmark when evaluating wavelength combinations, as well as performance estimates for several promising combinations.

show abstract

“…Environmental disturbances are the dominant sources of error in VSWI, which can be eliminated by conducting the experiment in a vacuum chamber [5]. This research adopts a differential heterodyne configuration to make VSWI practical for measuring large step heights under atmospheric condition.…”

Section: Introductionmentioning

confidence: 99%

Measuring large step heights by variable synthetic wavelength interferometry

Lu¹,

Lee²

2002

Meas. Sci. Technol.

View full text Add to dashboard Cite

Many mechanical and optical components contain step features whose surface height changes far exceed the optical wavelength. Therefore, this work presents an interferometer based on variable synthetic wavelength interferometry (VSWI) and differential heterodyne configuration to measure large step heights directly and unambiguously. This largely common-path configuration can substantially reduce the influence of environmental disturbances, which are the main sources of error in the VSWI. Only one external cavity diode laser (ECDL) is employed to synthesize a series of synthetic wavelengths in descending order. The wavelengths are combinations of the varied wavelengths and the initial wavelength of the ECDL. In contrast to wavelength scanning interferometry, this method does not require the laser wavelength to be continuously tuned. The step height is sequentially measured at these synthetic wavelengths and a lock-in amplifier resolves the corresponding synthetic fractional fringes. The step height is determined following a succession of optical path difference calculations, in terms of the synthetic wavelengths and measured synthetic fractional fringes. Three known step heights, verified by a gauge block interferometer, were used to confirm the performance of the proposed system. The results reveal that the uncertainty in the measurement is approximately 80 nm when the measured height is up to 25 mm.

show abstract

Measurement of absolute distance employing a tunable CW dye laser

Cited by 8 publications

References 4 publications

Process in absolute distance measurement using a dye laser

Process in absolute distance measurement using a dye laser

Choosing wavelengths and assessing blunder risk for the method of exact fractions

Measuring large step heights by variable synthetic wavelength interferometry

Contact Info

Product

Resources

About