Measurement method of spindle motion error based on composite laser target

Ni, He; Zhao, Wenguang; Qiu, Lirong

doi:10.1016/j.ijmachtools.2022.103860

Cited by 9 publications

(3 citation statements)

References 32 publications

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“…By evaluating this expectation value across the potential range of G i , the variance of the resulting output can be computed and further processed to derive the sensitivity indices. The term V Gi (E G∼i (∆|G i )) is the Saltelli's estimator [82], as detailed in equation (28). This estimator fundamentally assesses the covariance between the output error ∆ and the change in the output measurement error attributable to the ith geometric error component.…”

Section: Variance-based Global Geometric Error Sensitivity Analysismentioning

confidence: 99%

“…The total sensitivity indices for geometric error components are calculated based on equations ( 27) and (28), employing MATLAB's parallel computing capabilities to enhance computational efficiency. For a uniformed comparison, the sum of the total geometric error sensitivities at each of the 100 sample positions is normalized to one.…”

Section: System-oriented and Process-oriented Geometric Error Sensiti...mentioning

confidence: 99%

“…(2) Geometric error measurement: in this stage, the actual errors are meticulously quantified using appropriate measurement techniques. These can be classified into direct methods, such as laser interferometers [27,28], and indirect methods, including the R-test [29][30][31] and ballbar tests [32,33]. (3) Geometric error mapping: this step involves constructing a relational map based on the measured errors [34][35][36], thereby illuminating their interconnections and impact on system performance.…”

Section: Introductionmentioning

confidence: 99%

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Unified framework for geometric error compensation and shape-adaptive scanning in five-axis metrology systems

Zhang,

Yu,

Zhu

et al. 2024

Meas. Sci. Technol.

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In response to the escalating demand for precise shape metrology of complex optical surfaces, this study unveils a unified geometric error compensation and trajectory planning framework tailored for high-accuracy five-axis scanning metrology systems, which remains a notably underexplored field compared to error compensation in machine tools. Founded on a unified geometric model, the proposed framework seamlessly integrates a versatile shape-adaptive trajectory planning strategy, a thorough global error sensitivity analysis approach, and an exhaustive geometric error compensation scheme. Leveraging inverse kinematics, an innovative shape-adaptive scanning trajectory generation strategy is mathematically formulated, thereby facilitating adaptable measurement trajectory generation for diverse surface geometries. Employing forward kinematics, an exhaustive geometric error model is established to extensively address the 53 distinct geometric errors in the metrology system. This proposed error model fundamentally augments conventional geometric error models in machine tool by managing not only the geometric errors from the motion system, but also those from the probe and workpiece. To streamline the error compensation procedure, a novel global error sensitivity analysis approach is introduced, identifying both system-oriented and process-oriented sensitive geometric errors for targeted compensation. Experimental validation using a standard ball, which achieved an exceptional 89.35% reduction in the root mean square (RMS) of the measurement errors, further confirms the feasibility and effectiveness of the proposed framework. By offering an universal trajectory planning, sensitivity analysis and error compensation trinity for five-axis scanning metrology systems, this study sets the stage for precision advancements and design optimization across diverse configurations of metrology systems.

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Section: Variance-based Global Geometric Error Sensitivity Analysismentioning

confidence: 99%

Section: System-oriented and Process-oriented Geometric Error Sensiti...mentioning

confidence: 99%