2019
DOI: 10.1109/lmag.2019.2944581
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Measurement Characteristics of Different Integrated Three-Dimensional Magnetic Field Sensors

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Cited by 7 publications
(9 citation statements)
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“…The third component, VX, is influenced by projection BX of the magnetic flux density vector. In contrast to the previously mentioned two voltage components, this one has the opposite signs on potential electrodes 6 and 7: VX(6) = -VX (7). Particularly, under the influence of the Lorentz force in the top part (Fig.…”
Section: Structure and Operation Principlementioning
confidence: 75%
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“…The third component, VX, is influenced by projection BX of the magnetic flux density vector. In contrast to the previously mentioned two voltage components, this one has the opposite signs on potential electrodes 6 and 7: VX(6) = -VX (7). Particularly, under the influence of the Lorentz force in the top part (Fig.…”
Section: Structure and Operation Principlementioning
confidence: 75%
“…In [7] measurement characteristics of different integrated 3D magnetic field sensors were studied, whereas [8] discussed planarization, fabrication, and characterization. Crosstalk analysis and current measurement correction in circular 3D magnetic sensors arrays were given in [9].…”
Section: Literature Overviewmentioning
confidence: 99%
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“…Magnetic sensors are based on the transduction of different physical phenomena, as for instance the Electromagnetic Induction, Hall Effect, Tunnel Magnetoresistance (TMR), Giant Magnetoresistance (GMR), Anisotropic Magnetoresistance (AMR) and Giant Magnetoimpedance (GMI), [18]. The knowledge of the three Cartesian components of the magnetic field at the same time with a single miniaturized transducer is a great challenge for the semiconductor industry, [19], [20], [21]. In literature, detection techniques such as AMR or GMI are preferred for high-frequency magnetic field, due to their larger bandwidth, and for low magnetic fields (less than 1 mT).…”
Section: Introductionmentioning
confidence: 99%