Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films

Alsaad, Ahmad; Al‐Bataineh, Qais M.; Qattan, I. A.; Ababneh, A.; Albataineh, Zaid; Aljarrah, Ihsan A.; Telfah, Ahmad

doi:10.3389/fphy.2020.00115

Cited by 30 publications

(5 citation statements)

References 95 publications

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“…2). A lattice constant 'a' with 3.104 Å was reported by a previous study (Alsaad et al 2020) for AlN thin-film deposited with other sputtering parameters with different X-ray diffraction peaks, e.g. (100), (002), and (101).…”

Section: X-ray Diffraction (Xrd)mentioning

confidence: 62%

Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures

et al. 2021

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Aluminium nitride thin-films (AlN) were fabricated by a DC-magnetron sputtering technique at different background pressures while maintaining the same deposition conditions. The influence of varying sputtering pressure on the structural and optical properties of AlN thin-films was investigated. XRD measurements were utilized to determine the structural properties of the deposited AlN thin-films such as strain, stress, crystallite size, and crystalline density. They confirmed the hexagonal wurtzite structure of AlN thin-films and the increase in the degree of c-axis orientation as the sputtering pressure decreases. The optical properties of AlN thin-films, deposited on glass substrates, were analyzed by means of transmittance and absorption spectra using a UV-Vis spectrophotometer. The results have shown that an increase in the sputtering pressure leads to a shift of the threshold transmittance towards the lower wavelength range. This results in widening the optical bandgap and decreasing both the refractive index and the extinction coefficient. The dispersion of the refractive index is investigated according to the Wemple-DiDomenico single oscillator model and the model parameters (such as effective single oscillator E 0 , dispersion energy E d , zero-frequency dielectric constant e 0 and optical moments) were estimated accordingly.

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Section: X-ray Diffraction (Xrd)mentioning

confidence: 62%

Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures

et al. 2021

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“…In the case of Au/D-TiO 2 , the crystallographic peaks of Au could be detected ( Figure 1A). Defects in D-TiO 2 were tested by electron paramagnetic resonance (EPR) measurements ( Figure 1B), which indicated an aerobic vacancy defect with a g value of 2.015 [23][24][25].…”

Section: Resultsmentioning

confidence: 99%

Defective Titanium Dioxide-supported Ultrasmall Au Clusters for Photocatalytic Hydrogen Production

Zhang

et al. 2020

Front. Phys.

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Ultrasmall precious metal clusters have attracted extensive attention for providing a very specific surface and promoting electron transfer. In this work, ultrasmall Au clusters based on defective TiO2 nanosheets (Au/D-TiO2) were prepared and introduced into photocatalytic hydrogen evolution. Different defects of TiO2 nanosheets (D-TiO2) were constructed using a heating process and then loaded with Au clusters. Compared with bare TiO2, Au clusters established on defective TiO2 nanosheets with a narrower band gap showed higher light absorption performances, resulting in obviously enhanced photocatalytic hydrogen production performances. The Au/D-TiO2 displayed the greatly enhanced photocatalytic hydrogen evolution activity of 3,142.33 μmol h−1 g−1, which was over 45 times than the pure TiO2. The results showed that the catalysts had good prospects in the field of photocatalytic hydrogen production.

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“…The crystallinity of AlN is influenced by deposition conditions and has been widely investigated in optoelectronics. Lowering chamber pressures increase n and k of AlN by affecting crystal sizes and lattice constants − (Figure c). The bandgap of the AlN edge can be further optimized by adjusting substrate temperatures when AlN films are grown …”

Section: Bandgap Engineering For Metasurfacesmentioning

confidence: 99%

Revisiting Optical Material Platforms for Efficient Linear and Nonlinear Dielectric Metasurfaces in the Ultraviolet, Visible, and Infrared

et al. 2023

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The high refractive indexes and low optical losses of dielectrics are preferred for designing highly efficient metasurfaces with unprecedented wavefront control such as near-unity numerical aperture metalenses and wide-angle beam spreading. Regardless of such intuitive material selections, the correlation between metasurface performance and material properties has not been clearly defined. Notwithstanding the unclear correlation, the intensity ratio of manipulated light to input beam, often called the efficiency, is an important factor for constructing various photonic applications from augmented reality to sensors. In this context, the efficiency records of the previous metasurfaces should be classified with materials aspects to understand current limitations on their efficiencies. This perspective organizes the efficiency records of metasurfaces depending on optical materials, introducing a way to engineer the optical properties of various dielectric materials to improve metasurface efficiencies. Furthermore, this perspective covers the candidates for nonlinear optical materials that can potentially be used for efficient frequency conversion.

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Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films

Cited by 30 publications

References 95 publications

Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures

Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressures

Defective Titanium Dioxide-supported Ultrasmall Au Clusters for Photocatalytic Hydrogen Production

Revisiting Optical Material Platforms for Efficient Linear and Nonlinear Dielectric Metasurfaces in the Ultraviolet, Visible, and Infrared

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