Me-DLC films as material for highly sensitive temperature compensated strain gauges

Petersen, Mirjana; Heckmann, Ulrike; Bandorf, Ralf; Gwozdz, Virginia; Schnabel, Stephan; Bräuer, Günter; Klages, Claus‐Peter

doi:10.1016/j.diamond.2011.03.036

Cited by 44 publications

(25 citation statements)

References 14 publications

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“…The results of crystal size and phase analysis obtained by means of GIXRD and TEM correspond very well. Furthermore, the grain sizes obtained by GIXRD are consistent with values given in the literature [6].…”

Section: Discussionsupporting

confidence: 87%

“…Based on our results presented in Fig. 9, we conclude that the high strain sensitivity of our samples is not due to a tunneling process but instead due to a hopping mechanism in the carbon phase at temperatures below 20 K, as proposed by Huth [32], Koppert [18], and adapted by Petersen et al [6]. The conductivity mechanism in our Ni:a-C:H thin films below 20 K can be described by the Motts variable-range hopping model (ρ = ρ 0 × exp{(T 0 /T) 1/4 }, with ρ as the conductivity and T 0 a material specific constant) [33].…”

Section: Discussionmentioning

confidence: 67%

“…Our contribution leads to the development of nickel containing hydrogenated amorphous carbon films, that we call Ni:a-C:H or nanoNi@C. It can be shown that unlike a lot of other metals, nickel containing carbon has unique properties, namely a high strain sensitivity combined with a temperature invariant resistance [4][5][6][7]. This combination of properties makes Ni:a-C:H an attractive material for future sensor applications.…”

Section: Introductionmentioning

confidence: 98%

“…Using appropriate metals, the temperature coefficient of resistivity (TCR) can be adjusted by the metal concentration, ranging from highly negative TCR in the pure carbon matrix to positive, metallic like TCR in metal rich composites [6]. This paper focuses on establishing a structure-property relationship for this heterogeneous material using a simplified model of the composite material.…”

Section: Introductionmentioning

confidence: 99%

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Structural and physical properties of highly piezoresistive nickel containing hydrogenated carbon thin films

Koppert

Uhlig²,

Schmid-Engel³

et al. 2012

Diamond and Related Materials

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Section: Discussionsupporting

confidence: 87%

Section: Discussionmentioning

confidence: 67%

Section: Introductionmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Structural and physical properties of highly piezoresistive nickel containing hydrogenated carbon thin films

Koppert

Uhlig²,

Schmid-Engel³

et al. 2012

Diamond and Related Materials

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“…An elevated piezoresistivity was described for nickel-containing hydrogenated amorphous carbon Ni:a-C:H in 2006 (Schultes et al, 2006), while more physical and structural properties were published subsequently (Koppert et al, 2009(Koppert et al, , 2012Heckmann et al, 2011;Petersen et al, 2011Petersen et al, , 2012. In the present paper, we expand the investigations to 12 different transition metals in carbon (Me-C), explore their sensing properties, and aim to understand the reason for elevated strain sensitivity in terms of microscopic morphology.…”

Section: Introductionmentioning

confidence: 99%

Granular metal–carbon nanocomposites as piezoresistive sensor films – Part 1: Experimental results and morphology

Schultes¹,

Schmid-Engel²,

Schwebke³

et al. 2018

J. Sens. Sens. Syst.

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Abstract.We have produced granular films based on carbon and different transition metals by means of plasma deposition processes. Some of the films possess an increased strain sensitivity compared to metallic films. They respond to strain almost linearly with gauge factors of up to 30 if strained longitudinally, while in the transverse direction about half of the effect is still measured. In addition, the film's thermal coefficient of resistance is adjustable by the metal concentration. The influence of metal concentration was investigated for the elements Ni, Pd, Fe, Pt, W, and Cr, while the elements Co, Au, Ag, Al, Ti, and Cu were studied briefly. Only Ni and Pd have a pronounced strain sensitivity at 55 ± 5 at. % (atomic percent) of metal, among which Ni-C is far more stable. Two phases are identified by transmission electron microscopy and X-ray diffraction: metal-containing nanocolumns densely packed in a surrounding carbon phase. We differentiate three groups of metals, due to their respective affinity to carbon. It turns out that only nickel has the capability to bond and form a stable and closed encapsulation of GLC around each nanoparticle. In this structure, the electron transport is in part accomplished by tunneling processes across the basal planes of the graphitic encapsulation. Hence, we hold these tunneling processes responsible for the increased gauge factors of Ni-C composites. The other elements are unable to form graphitic encapsulations and thus do not exhibit elevated gauge factors.

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et al. 2012

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Heutzutage sind Dünnschicht‐Dehnungsmessstreifen z. B. für den Einsatz in hoch präzisen Drucksensoren weit verbreitet. Spezielle hochempfindliche piezoresistive Nanokomposit‐Schichten, die aus metallischen Nanopartikeln, eingebettet in eine isolierende Matrix aus diamantähnlichem Kohlenstoff (DLC), bestehen, können die Messgenauigkeit deutlich erhöhen. Wesentliche Parameter bei der Charakterisierung der Dünnschichten sind die Dehnungsempfindlichkeit (beschrieben durch den k‐Faktor) und der Temperaturkoeffizient des Widerstands (TCR). Der k‐Faktor von herkömmlich verwendeten NiCr‐Legierungen liegt bei ca. 2. Metall‐DLC‐NanokompositSchichten haben im Labormaßstab bereits eine 5‐ bis 10‐mal höhere Dehnungsempfindlichkeit in Kombination mit einem TCR nahe Null erreicht. Zunächst wurden die hochempfindlichen Schichten mittels statischer Beschichtung in einem Box‐Coater hergestellt, wobei sehr lange Prozesszeiten nötig waren. Durch die Verwendung eines dynamischen Prozesses in dem gleichen Beschichtungssystem konnte der Probendurchsatz leicht erhöht werden. Für den Einsatz dieser hochempfindlichen Schichten im industriellen Maßstab ist allerdings eine wesentlich höhere Effizienz erforderlich, weshalb der Prozess auf eine industrielle Kurztakt‐Hochrate‐Sputter‐Anlage übertragen wurde. Zusammen mit einer Steigerung der Dehnungsempfindlichkeit gegenüber dem dynamischen Prozess im Box‐Coater konnte in dieser neuen Sputter‐Anlage ein mehr als 20‐mal höherer Probendurchsatz erreicht werden.

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Me-DLC films as material for highly sensitive temperature compensated strain gauges

Cited by 44 publications

References 14 publications

Structural and physical properties of highly piezoresistive nickel containing hydrogenated carbon thin films

Structural and physical properties of highly piezoresistive nickel containing hydrogenated carbon thin films

Granular metal–carbon nanocomposites as piezoresistive sensor films – Part 1: Experimental results and morphology

Höchste Präzision in kurzer Taktzeit

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