Molecular Beam Epitaxy 2013
DOI: 10.1016/b978-0-12-387839-7.00028-2
|View full text |Cite
|
Sign up to set email alerts
|

MBE growth of THz quantum cascade lasers

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
7
0

Year Published

2014
2014
2022
2022

Publication Types

Select...
6

Relationship

0
6

Authors

Journals

citations
Cited by 7 publications
(7 citation statements)
references
References 119 publications
0
7
0
Order By: Relevance
“…Flux drift compensation was employed during the growth. 17 High Resolution X-ray Diffraction measurements revealed that layer thicknesses for all three structures were within 0.5% of the target parameters. The active region thickness was kept at 10 lm.…”
Section: Growth and Processingmentioning
confidence: 82%
“…Flux drift compensation was employed during the growth. 17 High Resolution X-ray Diffraction measurements revealed that layer thicknesses for all three structures were within 0.5% of the target parameters. The active region thickness was kept at 10 lm.…”
Section: Growth and Processingmentioning
confidence: 82%
“…The growth rate drift, arising from consumption of group III materials (Ga and Al), is of key importance for the growth of high performance THz QCLs [16]. When both high operating temperature and high output powers are required, the uniformity of the laser stack (or overall periodicity) is a high priority, and this poses stringent demands on the control of the material growth rates over the whole QCL growth period.…”
Section: Layer Thickness Control and Growth Reproducibilitymentioning
confidence: 99%
“…Yet, despite the extensive studies of waveguide and active region designs, there have been relatively few reports discussing the actual growth process itself, although insight is provided by [11][12][13][14][15]. An excellent compressive review [16], following the successful demonstration of THz QCLs with record working temperatures, does address the growth in greater detail. But issues such as the achievement of growth reproducibility in THz QCLs still need to be addressed fully.…”
Section: Introductionmentioning
confidence: 99%
“…However, much thicker growth brings difficult to precisely control the individual layer thicknesses and the compositions of alloys during a long-time growth by molecular beam epitaxy (MBE). [14,15] Meanwhile, an alternative way is to increase the doping level in each period. However, heavy doping result in more dephasings due to the enhanced scattering, meanwhile, also induce band bending because of the Poisson effect.…”
Section: Introductionmentioning
confidence: 99%
“…However, much thicker growth brings difficult to precisely control the individual layer thicknesses and the compositions of alloys during a long‐time growth by molecular beam epitaxy (MBE). [ 14,15 ]…”
Section: Introductionmentioning
confidence: 99%