1990
DOI: 10.1016/0022-0248(90)90253-h
|View full text |Cite
|
Sign up to set email alerts
|

Maximum length of large diameter Czochralski silicon single crystals at fracture stress limit of seed

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
5
0

Year Published

1998
1998
2022
2022

Publication Types

Select...
3
3
3

Relationship

0
9

Authors

Journals

citations
Cited by 19 publications
(5 citation statements)
references
References 4 publications
0
5
0
Order By: Relevance
“…Even if the neck has a diameter only in the range of a few millimeters, it can hold large and heavy Cz crystals with a weight up to 300 kg [24]. Without dislocations, no creeping effect occurs, which would narrow down the neck diameter and break it.…”
Section: Procedures Of the Czochralski Growth Processmentioning
confidence: 99%
“…Even if the neck has a diameter only in the range of a few millimeters, it can hold large and heavy Cz crystals with a weight up to 300 kg [24]. Without dislocations, no creeping effect occurs, which would narrow down the neck diameter and break it.…”
Section: Procedures Of the Czochralski Growth Processmentioning
confidence: 99%
“…Dash neck strength is roughly 144 kg/3 mm-d iameter-neck. 13 In t he 450 m m case, and even the 400 mm case of SSi, the neck is not expected to be able to su stain a heavy crystal. Thus, som e breakthrough was requi red.…”
Section: Economics Of 450 MM Wafersmentioning
confidence: 99%
“…(Each of the squares on the wafer in Figure 3 becomes a chip.) There are projections that a limiting wafer size will eventually be reached (13). 1 Fabricating the Si wafer into an IC illustrates more of the modern materials science toolbox (Fig.…”
Section: Manipulating Information: Silicon and Integrated Circuitsmentioning
confidence: 99%
“…However, calculations suggest that, if stress fracture is to be avoided, crystal diameters may ultimately be limited by the mass of the boule that the neck must support. A seed crystal 3 mm in diameter is estimated to be able to support a 144-kg silicon crystal (13 5. "Isotopically pure" diamond films containing 99.9% carbon-12 (rather than 99% carbon-12, as is found in natural diamonds) have been grown and have been found to conduct heat 50% better than natural diamonds, reflecting the reduction in isotope "defects" in the solid (61 ).…”
Section: Notesmentioning
confidence: 99%