Matrix based algorithm for ion-beam figuring of optical elements

Chernyshev, A. K.; Чхало, Н. И.; Malyshev, I. V.; Mikhailenko, M.S.; Pestov, A. E.; Плешков, Р. С.; Smertin, R. M.; Свечников, М. В.; Toropov, M. N.

doi:10.1016/j.precisioneng.2021.01.006

Cited by 29 publications

(8 citation statements)

References 17 publications

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“…If the sunken surface profile with a dozen of nanometers depth located on the surface of a meter class component requires to be figured, the figuring time using a scanning removal mode will be close to the consuming time in which a tool scans over nearly the entire surface, as shown in Fig. 1(d), for instance, dozens of hours in IBF [19]; In the contrast, the figuring time using the RIF parallel removal mode for the meter-class component will be only several minutes distributed in several loops, and there is almost no figuring time increase compared with the total figuring time of RIF for a small aperture sample. Schematics of figuring the sunken surface by RIF are shown in Fig.…”

Section: Methodsmentioning

confidence: 99%

Figure Correction of a Quartz Sub-Mirror for a Transmissive Diffractive Segmented Telescope by Reactive Ion Figuring

Luo

Wang

et al. 2022

IEEE Photon. Technol. Lett.

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A quartz sub-mirror was figure-corrected in a parallel removal process for the first time. An Reactive Ion Figuring (RIF) process with a simple and universal masking method was demonstrated, and the 350-mm quartz sub-mirror was figure-corrected from the initial figure error of ~23 nm RMS to the final figure error of ~8 nm RMS in total effective figuring time of ~52 minutes after 4 iterations, which exhibited the actual potential of RIF on the figure-correction of quartz optical elements and the possibility on applying RIF to meet the requirement of mass production for sub-mirrors of transmissive diffractive segmented telescopes.

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Section: Methodsmentioning

confidence: 99%

Figure Correction of a Quartz Sub-Mirror for a Transmissive Diffractive Segmented Telescope by Reactive Ion Figuring

Luo

Wang

et al. 2022

IEEE Photon. Technol. Lett.

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“…By inverse convolution, the removal function and removal amount of each grid point, the dwell time of each grid point is determined. By changing the speed of the machine tool motion axis, the dwell time of each grid point can be adjusted to realize the change of the corresponding point processing removal [ 20 , 21 , 22 ].…”

Section: Pib Machining Modification Theorymentioning

confidence: 99%

“…The PIB solves this problem by changing the principle of material removal. The key parameter matrix that controls the variation of the resection is the duty cycle (DC) matrix, which can contain zero values [ 22 ]. After the duty cycle corresponding to each grid point is obtained, the plasma will be beamed according to the calculated duty cycle matrix.…”

Section: Pib Machining Modification Theorymentioning

confidence: 99%

Figuring Method of High Convergence Ratio for Pulsed Ion Beams Based on Frequency-Domain Parameter Control

et al. 2022

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The continuous phase plate (CPP) provides excellent beam smoothing and shaping impacts in the inertial confinement fusion application. However, due to the features of its dispersion, its surface gradient is frequently too large (>2 μm/cm) to process. When machining a large gradient surface with continuous ion beam figuring (IBF), the acceleration of the machine motion axis cannot fulfill the appropriate requirements, and the machining efficiency is further influenced by the unavoidable extra removal layer. The pulsed ion beam (PIB) discretizes the ion beam by incorporating frequency-domain parameters, resulting in a pulsed beam with a controlled pulse width and frequency and avoiding the extra removal layer. This research evaluates the processing convergence ability of IBF and PIB for the large gradient surface using simulation and experiment. The findings reveal that PIB offers obvious advantages under the same beam diameter. Compared with the convergence ratio (γ = 2.02) and residuals (RMS = 184.36 nm) of IBF, the residuals (RMS = 27.48 nm) of PIB are smaller, and the convergence ratio (γ = 8.47) is higher. This work demonstrates that PIB has better residual convergence in large gradient surface processing. It is expected to realize ion beam machining with a higher convergence ratio.

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“…Эксперименты проводились на установке и по методикам, описанным в [16]. Единственным отличием является то, что при расчете траектории движения ионного пучка по детали использовался усовершенствованный алгоритм, позволяющий при том же диаметре ионного пучка в 2 раза повысить пространственные частоты неоднородностей, которые могут обрабатываться в процессе ионного травления [17].…”

Section: улучшение поверхности корректора методом ионно-пучкового травленияunclassified

Линзовый Корректор Волнового Фронта Для Изучения Плоских Поверхностей

Toropov¹,

Ахсахалян²,

Malyshev³

et al. 2021

Журнал Технической Физики

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The method of manufacturing and the results of studies of a lens corrector that converts a spherical diverging front into a plane one and is intended for studying flat surfaces as part of an interferometer with a diffraction comparison wave is described. A feature of the corrector is the use of an aspherical convex surface with a maximum deviation of ∼200 μm from the nearest sphere. The first experimental results are presented, indicating the prospects for using ion-beam processing to improve the quality of the wavefront. After the procedure of ion-beam processing, the aberrations over the entire aperture of the corrector decreased by more than 4 times and amounted to the parameter of the height difference PV = 207 nm (∼λ/3) and RMS = 19.2 nm (∼λ /33). On an area with a diameter of 80%, the aberrations fell to the nanometer level: PV = 65 nm (∼λ/10) and RMS = 8.3 nm (∼λ/76).

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Matrix based algorithm for ion-beam figuring of optical elements

Cited by 29 publications

References 17 publications

Figure Correction of a Quartz Sub-Mirror for a Transmissive Diffractive Segmented Telescope by Reactive Ion Figuring

Figure Correction of a Quartz Sub-Mirror for a Transmissive Diffractive Segmented Telescope by Reactive Ion Figuring

Figuring Method of High Convergence Ratio for Pulsed Ion Beams Based on Frequency-Domain Parameter Control

Линзовый Корректор Волнового Фронта Для Изучения Плоских Поверхностей

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