Materials modification using intense ion beams

Renk, Timothy Jerome; Provencio, Paula Polyak; Prasad, Somuri V.; Shlapakovski, A.; Petrov, A. V.; Yatsui, Kiyoshi; Jiang, Weihua; Suematsu, Hisayuki

doi:10.1109/jproc.2004.829024

Cited by 98 publications

(33 citation statements)

References 85 publications

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“…Ion irradiation of the samples with accelerated C + , n + and H + carbon ions (85% and 15%, respectively) was carried out with a TEMP-4M pulse accelerator [31,32] at a residual chamber pressure of 2 • 10 −2 Pa. Irradiation modes are the following: an accelerating voltage of 160 -200 keV, the pulse duration (at half maximum of the accelerating voltage) of the current was 100 ns, the current density in the pulse varied in the range 15 -85 А/cm 2 . Pulse repetition rate 8 s .…”

Section: Experimental Techniquementioning

confidence: 99%

“…The use of ceramics with gradient properties has great prospects, when the surface layer differs in its characteristics from the corresponding parameters of the bulk layers. As shown in works [11][12][13][14][15][16][17][18][19][20][21][22][23][24], surface treatment can be effectively carried out using low energy high current pulsed electron beam (LEHCPEB) [11][12][13], laser treatment [14,15] and high-power pulsed ion beam (HPPIB) [16][17][18][19][20][21][22][23][24]. To study thin modified layers of dielectrics, the method of secondary ion mass spectrometry [25][26][27] and the Rutherford backscattering method [28,29] have proved to be very useful.…”

Section: Introductionmentioning

confidence: 99%

“…They allow to carry out high-precision treatment of complex shaped ceramic parts with a short exposure time to the surface, are equipped with simple process automation, etc. Among radiation methods of influence on materials, the method of surface modification by highpower pulsed ion beams (HPPIB) [16][17][18][19][20][21][22][23][24] widely is used.…”

Section: Introductionmentioning

confidence: 99%

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Influence of a high-power pulsed ion beam on the mechanical properties of corundum ceramics

Kostenko

Pavlov

Nikolaeva

2018

IOP Conf. Ser.: Mater. Sci. Eng.

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Abstract. The mechanical properties of near-surface layers of corundum ceramics treated by high-power pulsed ion beam of carbon are investigated. The samples for investigation were prepared from corundum substrate, which is usually used in microelectronic. The ion treatment was carried out at the TEMP-4M facility under the following conditions: an accelerating voltage of 160-200 keV, the current density in the pulse varied within 15-85 A/cm 2 . It was found that ion irradiation changes the structure and properties of near-surface layers of corundum ceramics. At the same time, melting and erosion of the surface layer takes place. These processes are accompanied by the formation of a network of microcracks. Microcracks are propagated only by the depth of melting layer. The mechanical properties were measured using a NanoTest600 nanohardness testing instrument. It was found that the nanohardness depends of the treatment modes. At a current density of 15A/cm 2 , with an increase treatment dose, the nanohardness of the irradiated surface layer increases in comparison with the initial value before irradiation. At higher current densities, the nanohardness of irradiated ceramics decreases relatively to the initial value before irradiation. The dependences of nanohardness off the irradiation dose in this case have the view of a curves with a minimum at irradiation doses of 2.5•10 14 and 1.3•10 14 cm -2 , for current densities of 50 and 85 A/cm 2 , respectively.

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Section: Experimental Techniquementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Influence of a high-power pulsed ion beam on the mechanical properties of corundum ceramics

Kostenko

Pavlov

Nikolaeva

2018

IOP Conf. Ser.: Mater. Sci. Eng.

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“…В частности, они поз воляют сохранять стехиометрический состав ве щества мишени в осаждаемых покрытиях, обес печивают их чистоту. При этом достигается до вольно большая площадь обработки (десятки квадратных сантиметров) и приемлемая произво дительность [1][2][3]. МИИП могут применяться и для осаждения биосовместимых кальций фосфат ных покрытий (КФ покрытий) на поверхность различных имплантатов, использующихся в сто матологии, травматологии и ортопедии [4][5][6].…”

Section: Introductionunclassified

Влияние Режимов Облучения Мишеней Из Гидроксиапатита Мощными Импульсными Ионными Пучками На Свойства Сформированных Кальций-Фосфатных Покрытий

Блейхер¹,

Волокитина²,

Tverdokhlebov³

2013

Поверхность. Рентген., синхротрон. и нейтрон. исслед.

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Томский политехнический университет, Томск, РоссияПоступила в редакцию 01.02.2013 г.Исследованы физико механические свойства биосовместимых кальций фосфатных покрытий, осажденных на титановые и кремниевые подложки из эрозионного материала, образованного при облучении мишеней из гидроксиапатита (синтетического и натурального) мощным импульсным ионным пучком ускорителя ТЕМП 4М. Предложена расчетная методика для прогнозирования ско рости и энергоэффективности осаждения по заданным параметрам импульсных ионных пучков. Вы полнен анализ этих характеристик применительно к формированию кальций фосфатных покрытий.

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“…Each ion beam pulse can lead to layer thicknesses from 1 to 100 nm over areas tens of cm 2 . Previous PIBD deposition experiments using RHEPP-1 [1] have yielded high-quality thin layers of fine-grain or amorphous microstructure, which in particular lacked the columnar structure seen on sputtered layers. This can be attributed in part to the high kinetic energy of the ablation plasma, estimated at tens of eV compared to fractions of an eV for plasmas formed by magnetron sputtering.…”

Section: Introductionmentioning

confidence: 99%

Ultra-thin multilayer capacitors.

Renk¹,

Monson²

2009

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The fabrication of ultra-thin lanthanum-doped lead zirconium titanate (PLZT) multilayer ceramic capacitors (MLCCs) using a high-power pulsed ion beam was studied. The deposition experiments were conducted on the RHEPP-1 facility at Sandia National Laboratories. The goal of this work was to increase the energy density of ceramic capacitors through the formation of a multilayer device with excellent materials properties, dielectric constant, and standoff voltage. For successful device construction, there are a number of challenging requirements including achieving correct stoichiometric and crystallographic composition of the deposited PLZT, as well as the creation of a defect free homogenous film. This report details some success in satisfying these requirements, although 900 °C temperatures were necessary for PLZT perovskite phase formation. These temperatures were applied to a previously deposited multi-layer film which was then post-annealed to this temperature. The film exhibited mechanical distress attributable to differences in the coefficient of thermal expansion (CTE) of the various layers. This caused significant defects in the deposited films that led to shorts across devices. A followon single layer deposition without post-anneal produced smooth layers with good interface behavior, but without the perovskite phase formation. These issues will need to be addressed in order for ion beam deposited MLCCs to become a viable technology. It is possible that future in-situ heating during deposition may address both the CTE issue, and result in lowered processing temperatures, which in turn could raise the probability of successful MLCC formation. 4 ACKNOWLEDGMENTSThe authors wish to thank Donald L. Overmyer for his help in collecting X-ray diffraction (XRD) data, Tyler E. Stevens for assistance with sample annealing, Paula Provencio for collecting SEM and TEM images, and Gerard. A. Torres for technical assistance in the RHEPP-1 deposition experiments.5

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Materials modification using intense ion beams

Cited by 98 publications

References 85 publications

Influence of a high-power pulsed ion beam on the mechanical properties of corundum ceramics

Influence of a high-power pulsed ion beam on the mechanical properties of corundum ceramics

Влияние Режимов Облучения Мишеней Из Гидроксиапатита Мощными Импульсными Ионными Пучками На Свойства Сформированных Кальций-Фосфатных Покрытий

Ultra-thin multilayer capacitors.

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