Materials for microbolometers: vanadium oxide or silicon derivatives

Voshell, Andrew; Dhar, Nibir K.; Rana, Mukti M.

doi:10.1117/12.2263999

Cited by 13 publications

(13 citation statements)

References 31 publications

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“…From the transient voltage results, a R v of 28.1 VW −1 can be calculated (at 5 Hz). This R v value is low when we compared to other flexible bolometer devices, typical values of >10 3 VW −1 can be found in the literature 29,30,37 . Although our devices possess high light absorption and elevated TCR values, the low R v value is not surprising.…”

Section: Device Characterizationmentioning

confidence: 65%

“…1, a high TCR is critical for bolometer operations. Bolometer TCR values typically range between 0.1%°C −1 and 9%°C −1 and depend heavily on the absorber material used 29,30,37 . In the case of the devices presented in this article, the change of resistance originates from the silver interdigital electrodes and the flexible PET substrate.…”

Section: Device Characterizationmentioning

confidence: 99%

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All inkjet-printed perovskite-based bolometers

et al. 2020

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We show flexible bolometer devices produced entirely using digital inkjet printing on polymer substrates. The bolometers consist of a silver interdigital electrode thermistor covered with a methylammonium lead trihalide perovskite absorber layer which shows good absorber characteristics at visible wavelengths. Both the standalone thermistor and the complete bolometer devices show polymer PTC thermistor-like behavior over a temperature range of 17 to 36 °C, with a change in resistance up-to six orders of magnitude over this temperature range. The addition of the perovskite absorber to the thermistor structure provides the illumination-dependent behavior proper to bolometers.

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Section: Device Characterizationmentioning

confidence: 65%

Section: Device Characterizationmentioning

confidence: 99%

All inkjet-printed perovskite-based bolometers

et al. 2020

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“…Generally different materials are used for these layers to increase the performance of the detectors. Vanadium oxide (VO x ) and amorphous silicon (a-Si) are the mostly used active detector materials in microbolometers [2][3][4][5], while silicon nitride (Si 3 N 4 ) is generally used as absorber layer [6,7]. This multi layer structure increases the design and fabrication complexity and dependently increases the cost of the detector.…”

Section: Introductionmentioning

confidence: 99%

Pixel level vacuum packaging for single layer microbolometer detectors with on pixel lens

Tanrikulu

2022

Journal of Electrical Engineering

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This paper presents a new approach for fabrication of single layer microbolometer detectors featuring pixel level vacuum packaging together with a lens on the pixel. The proposed lens structure can be used to increase the fill factor of the detector so that the pixel size can be decreased without decreasing the minimum feature size in the detector which is a problem in single layer microbolometers. The designs of the lens and the fabrication process of pixel level vacuum packaged microbolometer detector together with this lens are given in the framework of this study. The optical and mechanical simulations of the structure are performed. The radius of curvature of the lens is optimized to be 25 μm and it is shown that the condensing efficiency is 100% for 3 μm lens-detector distance. The deflection in the lens structure is found approximately as 0.8 nm in 1 atm environment pressure, showing that the proposed structure is durable. The proposed structure increases the fill factor to twice of the original value without decreasing the minimum feature size in the fabrication processes, resulting in the same amount of improvement in the performance of the detector. This approach can also be used to increase the yield and decrease the fabrication cost of single layer and also standard microbolometers with small pixel sizes, as it integrates the vacuum packaging in the fabrication steps.

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“…The IR thermography at ambient finds diverse applications in fields ranging from night vision (2), security surveillance (3), and electronics inspection (4) to medical diagnostics (5), structural defect screening (6), and academic research (7). The noise-equivalent differential temperature (NEDT), one key figure of merit for these cameras, has been improved via better designs to enhance detection and conversion of P rad (8)(9)(10), while assuming the T dependence of P rad to be strictly bounded by the T 4 law. Consequently, the roadmap of NEDT currently saturates at 20 to 40 mK for uncooled bolometers, with little advance in the past decades (1,11).…”

Section: Introductionmentioning

confidence: 99%

Millikelvin-resolved ambient thermography

et al. 2020

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Thermography detects surface temperature and subsurface thermal activity of an object based on the Stefan-Boltzmann law. Impacts of the technology would be more far-reaching with finer thermal sensitivity, called noise-equivalent differential temperature (NEDT). Existing efforts to advance NEDT are all focused on improving registration of radiation signals with better cameras, driving the number close to the end of the roadmap at 20 to 40 mK. In this work, we take a distinct approach of sensitizing surface radiation against minute temperature variation of the object. The emissivity of the thermal imaging sensitizer (TIS) rises abruptly at a preprogrammed temperature, driven by a metal-insulator transition in cooperation with photonic resonance in the structure. The NEDT is refined by over 15 times with the TIS to achieve single-digit millikelvin resolution near room temperature, empowering ambient thermography for a broad range of applications such as in operando electronics analysis and early cancer screening.

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Materials for microbolometers: vanadium oxide or silicon derivatives

Cited by 13 publications

References 31 publications

All inkjet-printed perovskite-based bolometers

All inkjet-printed perovskite-based bolometers

Pixel level vacuum packaging for single layer microbolometer detectors with on pixel lens

Millikelvin-resolved ambient thermography

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