Materials, effects and components for tunable micro‐optics

Friese, C.; Werber, A.; Krogmann, F.; Mönch, Wolfgang; Zappe, Hans

doi:10.1002/tee.20138

Cited by 36 publications

(20 citation statements)

References 27 publications

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“…͓DOI: 10.1063/1.3183534͔ Tuneable micro-optics are currently manufactured almost exclusively from polymers ͓polydimethylsiloxane ͑PDMS͒ and SU8͔ or silicon. 1 These materials are, however, limited by their mechanical and tribological properties which make them less than ideal for applications in fast moving microelectromechanical systems ͑MEMS͒ devices and in harsh environments where optical transparency is required. Microlenses made of polymer membranes and pneumatically tuned by hydrogels or oils show adverse effects such as swelling of the membrane and no uniformity of the membrane thickness during expansion which causes spherical aberration.…”

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confidence: 99%

Tuneable optical lenses from diamond thin films

Kriele

Williams

Wolfer

et al. 2009

Applied Physics Letters

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Nanocrystalline diamond (NCD) membranes of 150 nm thickness and diameters in the millimeter range grown by microwave-assisted chemical-vapor deposition were bulged to investigate their mechanical properties and their use as tuneable optical lenses. The NCD films were grown at different CH(ind 4)/H(ind 2) gas mixtures to vary the sp(exp 2)/sp(exp 3) ratio and thereby to tune their mechanical, optical, and surface morphology properties. By applying gas over pressure the membrane forms a lens shaped geometry. From deflection data we calculated Young's moduli which decrease with increasing CH(ind 4)/H(ind 2) ratio from 1160 GPa at 0.5% to 900 GPa at 7%. Optical lens applications show a variation in the focal point from infinity to 3.5 mm. The data indicate that NCD is a promising material for tuneable optical lenses applications

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confidence: 99%

Tuneable optical lenses from diamond thin films

Kriele

Williams

Wolfer

et al. 2009

Applied Physics Letters

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“…The small sizes of micro-optical components allow the use of numerous physical effects for tuning the optical characteristics of a device which are not applicable on larger-size scales; in particular, the use of liquids and deformable materials has led to a broad spectrum of inherently tunable micro-optical components ( [3] , Chapter 12; [47] ).…”

Section: Tunable Micro-opticsmentioning

confidence: 99%

Micro-optics: a micro-tutorial

Zappe

2012

Advanced Optical Technologies

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Micro-optics represents a rich discipline with many features not found in classical optics. Yet micro-optics is not merely ' small optics ' . Using the technologies of microfabrication, entirely new fabrication processes, new materials and new types of optical devices have been conceived. Here, we provide a brief introduction to the fi eld, discussing a variety of miniaturized optical components, as well as the materials from which they are made and the novel technologies used to fabricate them. Designed as a tutorial, this brief pr é cis includes adequate literature references to guide the interested reader to more in-depth treatments.

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“…Therefore, they are often not applicable in the fast microelectromechanical systems (MEMSs), as well as in the devices operating in either harsh or biological environments [1]. Using thin film nanodiamond (ND) membranes which shapes are controlled by piezoelectrical AlN actuators [2] will overcome these limits as these materials are known to exhibit exceptional hardness, chemical stability, and high thermal conductivity in addition to optical transparency from ultra-violet to far infrared [3].…”

Section: Introductionmentioning

confidence: 99%