2009
DOI: 10.1088/0022-3727/42/12/123001
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Massively parallel fabrication of repetitive nanostructures: nanolithography for nanoarrays

Abstract: This topical review provides an overview of nanolithographic techniques for nanoarrays. Using patterning techniques such as lithography, normally we aim for a higher order architecture similarly to functional systems in nature. Inspired by the wealth of complexity in nature, these architectures are translated into technical devices, for example, found in integrated circuitry or other systems in which structural elements work as discrete building blocks in microdevices. Ordered artificial nanostructures (arrays… Show more

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Cited by 37 publications
(16 citation statements)
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References 136 publications
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“…For example, the miniaturization trend in many magnetic devices is driving the state of the art magnetic devices to the tens of nm dimensions [11,16,[454][455][456][457]. Thus, to further push the limits of some magnetic devices core/shell nanoparticles could be an attractive alternative.…”
Section: Other Applicationsmentioning
confidence: 99%
“…For example, the miniaturization trend in many magnetic devices is driving the state of the art magnetic devices to the tens of nm dimensions [11,16,[454][455][456][457]. Thus, to further push the limits of some magnetic devices core/shell nanoparticles could be an attractive alternative.…”
Section: Other Applicationsmentioning
confidence: 99%
“…MBIL can be used to define this underlying periodic or quasi-periodic grid-based structure. In this application, MBIL immediately has the advantages of (1) simple optics, (2) large working distances, (3) fast processing, (4) low cost, and (5) extendable to higher resolutions [4,25,[169][170][171].…”
Section: Multi-beam Interference Lithography and Nano-electronicsmentioning
confidence: 99%
“…18 Recently, also a review on massively parallel fabrication of nanoarrays was presented by the the author of this paper. 19 Some specific examples of nonlithographic templating have been already mentioned above, the following sub-sections will focus on top-down lithographically-assisted, collodial, bio-inspired and biotemplated oxide nanoarrays.…”
Section: Top-down Lithography and Bottom-up Techniquesmentioning
confidence: 99%