“…Short wavelengths are generally necessary for surface material processing. [1][2][3] Light sources in these spectral regions will thus be applied in various scientific and engineering fields, such as semiconductor lithography, 4-6 diagnostics in dense plasmas, materials processing, photochemistry, biological imaging, and so on. Recently, a desorption spectrometer employing a compact, efficient discharge-produced microplasma extreme ultraviolet ͑XUV͒ source in the 20-100 nm broadband spectral region has been proposed, which has the advantage of neither damaging or melting the surface after irradiation.…”