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We have demonstrated suppression of suprathermal ions from a colloidal microjet target plasma containing tin-dioxide (SnO2) nanoparticles irradiated by double laser pulses. We observed a significant decrease of the tin and oxygen ion signals in the charged-state-separated energy spectra when double laser pulses were irradiated. The peak energy of the singly ionized tin ions decreased from 9to3keV when a preplasma was produced. The decrease in the ion energy, considered as debris suppression, is attributed to the interaction between an expanding low-density preplasma and a main laser pulse.

Debris characteristics and their reduction have been investigated for a laser-produced plasma extreme ultraviolet source by using a colloidal jet target containing tin dioxide nanoparticles. The amounts of deposited debris on a witness plate were determined by total laser energy irradiated onto a target. In situ low-temperature (100°C) heating of a plate was effective to reduce the amounts of deposited debris, since colloidal debris was easily vaporized by the heat.

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