Mass-resolved retarding field energy analyzer and its measurement of ion energy distribution in helicon plasma

Jiang, Nan; Zhao, Nian; Liu, Hongfei; Fang, Tongzhen

doi:10.1016/j.nimb.2004.12.121

Cited by 3 publications

(2 citation statements)

References 47 publications

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“…Retarding field analyzers (RFAs) are one of the abundantly used solutions for this task due to their easy use and simple implementation [11][12][13][14][15]. In the case where mass discrimination is needed, a combination of mass and energy analyzer, typically known as a plasma monitor, is used [16][17][18][19]. However, as far as is known to the authors, the technique has not yet been applied to investigate the velocity distribution of nano-size clusters.…”

Section: Introductionmentioning

confidence: 99%

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Velocity distribution of mass-selected nano-size cluster ions

Ganeva¹,

Pipa

Smirnov

et al. 2013

Plasma Sources Sci. Technol.

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The paper reports on an experimental investigation of the ion velocity distribution function (IVDF) for mass-selected copper cluster ions with a diameter in the range 5-10 nm. The cluster ion beam is produced by a dc magnetron-based gas aggregation source. The measurements are carried out by means of a quadrupole mass filter combined with a basic retarding field analyser. The most probable cluster velocities are in the range 80-180 m s −1 ; decreasing with cluster size and increasing with buffer gas (Ar) flow. Experimental results are compared with the theoretical model of Smirnov et al. Noted discrepancies are explained by the interaction of clusters with buffer gas atoms outside the aggregation chamber during the passage from the orifice towards the detector. This interaction is not included in the theoretical model. Both positively and negatively charged clusters are investigated. The density ratio of positively to negatively charged clusters in the beam is evaluated from the measured IVDFs and compared with the theoretical model.

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Section: Introductionmentioning

confidence: 99%

“…The combination of mass and energy analyser is typically used in plasma monitors [16][17][18][19]. In such systems the ions first enter the energy analyser and then proceed to the mass spectrometer.…”

Section: Introductionmentioning

confidence: 99%

Velocity distribution of mass-selected nano-size cluster ions

Ganeva¹,

Pipa

Smirnov

et al. 2013

Plasma Sources Sci. Technol.

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A Detailed Investigation of Radicals and Ions in ECR Methane/Argon Microwave Discharge

Pokorný

Mišina

Novotný

et al. 2016

Plasma Processes & Polymers

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In this work, we focus on study of the formation and behavior of molecules, radicals, and ions in ECR discharge in a mixture of argon and methane. Discharge properties are studied at various conditions; total gas flow (0-50 sccm), absorbed microwave power (0-900 W) and the partial pressure of methane (0-1.2 Pa). Neutral mass spectrometry does not reveal the presence of radical CH 5 commonly described in literature. Spectra show the presence of atomic hydrogen H and especially H 2 molecules. The number of CH 4 þ and CH 3 þ species shows that the amount of CH 4 þ in areas power up to 350 W is high, but with further increase of the power their amount decreases. With the increasing power the CH 3 þ ions are more intensively generated. The obtained data helps optimize process conditions for the fabrication of diamond and DLC thin films.

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Development of an energy spread analyzer for secondary ion mass spectrometry ion source

Zhou

Zhai

Jin

et al. 2023

Review of Scientific Instruments

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The energy spread (ΔE) of an ion source is an important parameter in the production of a finely focused primary ion beam applied in secondary ion mass spectrometry (SIMS). A variable-focusing retarding field energy analyzer (RFEA) has been developed and tested with an Ar+ beam and an oxygen ion beam extracted from a 2.45 GHz microwave ion source, which is developed as a candidate ion source for SIMS applications. The simulation results show that the relative resolution ΔE/E of the designed RFEA reaches 7 × 10−5. The experimental results indicate that a focusing electrode can improve the ΔE measurement results, which is consistent with the simulation results. The ion energy distributions of the Ar+ beam and oxygen ion beam are of Gaussian distribution with the value of ΔE of 3.3 and 2.9 eV, respectively. These results indicate that the designed RFEA is reliable for measuring the ion beam energy spread. The developed RFEA is also used to study the plasma behavior in different settings, which reveals that plasma stability is critical to making a low energy spread ion beam. This paper will present the simulation, design, and test of the variable-focusing RFEA. Preliminary ion beam quality studies with this instrument will also be discussed.

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Mass-resolved retarding field energy analyzer and its measurement of ion energy distribution in helicon plasma

Cited by 3 publications

References 47 publications

Velocity distribution of mass-selected nano-size cluster ions

Velocity distribution of mass-selected nano-size cluster ions

A Detailed Investigation of Radicals and Ions in ECR Methane/Argon Microwave Discharge

Development of an energy spread analyzer for secondary ion mass spectrometry ion source

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