Intense ion beam production is of high importance for various versatile applications from accelerator injectors to secondary ion mass spectrometry (SIMS). For these purposes, different types of ion beams are needed and, accordingly, the optimum plasma to produce the desired ion beams. RF-type plasma features a simple structure, high plasma density and low plasma temperature, which is essential for negative ion beam production. A very compact RF-type ion source using a planar coil antenna has been developed at IMP for negative molecular oxygen ion beam production. In terms of high-intensity positive ion beam production, 2.45 GHz microwave power-excited plasma has been widely used. At IMP, we developed a 2.45 GHz plasma source with both ridged waveguide and coaxial antenna coupling schemes, tested successfully with intense beam production. Thanks to the plasma built with an external planar coil antenna, high O2− production efficiency has been achieved, i.e., up to 43%. With 2.45 GHz microwave plasma, the ridged waveguide can support a higher power coupling of high efficiency that leads to the production of intense hydrogen beams up to 90 emA, whereas the coaxial antenna is less efficient in power coupling to plasma but can lead to attractive ion source compactness, with a reasonable beam extraction of several emA.
A negative oxygen ion source is under development to produce O− and O2− beams used for a secondary ion mass spectrometer at Institute of Modern Physics (IMP), and both filament and radio frequency (RF) schemes are tested. The filament driven ion source, which was initially designed for H− production, has a 10-pole multicusp plasma chamber, two sets of virtual magnetic filters, and a 3-electrode extraction system. The RF scheme, which is improved by changing a RF back plate from the filament ion source, has an external planar spiral RF antenna behind an AlN window. The RF power system consists of a continuous wave (CW) 13.56 MHz/2 kW power supply, a capacitive automatching network and a water-cooled flat RF antenna made from a 6-mm copper tube. Oxygen and carbon dioxide gases are used to produce O− and O2− ion beams, and ion composition is analyzed by using a Wien filter. However, the lifetime of filaments sustains from several minutes to hours before fracture occurred while the RF one can work stably with no maintenance, and the experiment results will be given on O− ion production with two different technologies using our ion source test facility.
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