Mass and energy selected ion beam for deposition and ion induced surface modifications

Küttel, O. M.; Groening, P.; Agostino, R. G.

doi:10.1116/1.579610

Cited by 13 publications

(7 citation statements)

References 9 publications

(9 reference statements)

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“…23,25,203,311,312 However, most stud-ies employ chemically nonspecific modifications to alter the adsorbate. [313][314][315] Chemically selective incorporation of functional groups into surfaces using reactive gaseous ions has been achieved. 25,205,249 For example, halogen exchange between the projectile ions and fluorinated surfaces is one chemically specific pathway to introduce halogens into fluorocarbon surfaces.…”

Section: Surface Modification By Ionõsurface Reactionsmentioning

confidence: 99%

Collisions of ions with surfaces at chemically relevant energies: Instrumentation and phenomena

Grill¹,

Shen²,

Evans³

et al. 2001

Review of Scientific Instruments

201

249

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Articles you may be interested inMeasuring the internal energies of species emitted from hypervelocity nanoprojectile impacts on surfaces using recalibrated benzylpyridinium probe ions High-energy ions and atoms sputtered and reflected from a magnetron source for deposition of magnetic thin films J. Vac. Sci. Technol. A 23, 671 (2005); 10. 1116/1.1943452 Surface induced dissociations of protonated ethanol monomer, dimer and trimer ions: Trimer break-down graph from the collision energy dependence of projectile fragmentation An overview of gaseous ion/surface collisions is presented, with special emphasis on the behavior of polyatomic projectile ions at hyperthermal collision energies ͑1-100 eV͒ and the instrumentation needed for such studies. The inelastic and reactive processes occurring during ion/surface collisions are described in terms of several archetypes, viz., elastic and quasielastic scattering, chemical sputtering leading to release of surface material, inelastic scattering leading to surface-induced dissociation ͑SID͒ of the projectile, ion/surface reactions, and soft landing. Parameters that are important in ion/surface interactions are discussed, including the interaction time, the conversion of translational to internal energy, the translational energies of the scattered ions, the effects of scattering angle, and the influence of the nature of the surface. Different types of tandem mass spectrometers, built specifically to study ion/surface collision phenomena, are discussed and the advantages and disadvantages of the individual designs are compared. The role of SID as a technique in bioanalytical mass spectrometry is illustrated and this inelastic collision experiment is compared and contrasted with gas-phase collision-induced dissociation, the standard method of tandem mass spectrometry. Special emphasis is placed on reactive scattering including the use of ion/surface reactions for surface chemical analysis and for surface chemical modification.

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Section: Surface Modification By Ionõsurface Reactionsmentioning

confidence: 99%

Collisions of ions with surfaces at chemically relevant energies: Instrumentation and phenomena

Grill¹,

Shen²,

Evans³

et al. 2001

Review of Scientific Instruments

201

249

View full text Add to dashboard Cite

show abstract

“…Low-energy (10−100 eV) ion/surface collisions are of growing interest for the preparation of chemically modified surfaces − and as a means of uncovering novel chemical processes at interfaces. , While inelastic collisions which lead to surface-induced dissociation (SID) have been accorded most attention, − ion/surface reactions are being explored in increasing detail. These chemical reactions occur between the projectile ion, or its fragments, and specific chemical functional groups present on the surface. − One of the best-studied ion/surface reactions is the protonation or alkylation of incident polyatomic projectiles, especially in the case of such radical cations as the molecular ions of pyrazine and benzene .…”

Section: Introductionmentioning

confidence: 99%

“…Low-energy (10-100 eV) ion/surface collisions are of growing interest for the preparation of chemically modified surfaces [6][7][8][9] and as a means of uncovering novel chemical processes at interfaces. 10,11 While inelastic collisions which lead to surface-induced dissociation (SID) have been accorded most attention, [12][13][14][15][16] ion/surface reactions are being explored in increasing detail.…”

Section: Introductionmentioning

confidence: 99%

Cleavage of C−C and C−F Bonds by Xe⁺^• and I⁺ Ions in Reactions at a Fluorinated Self-Assembled Monolayer Surface: Collision Energy Dependence and Mechanisms

et al. 1998

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Collisions of Xe+• with a fluorinated self-assembled monolayer surface cause C−C and C−F bond cleavage as evidenced by the reactively scattered ions XeCF2 +•, XeCF+, and XeF+. The projectile ion extracts difluorocarbene from the fluorocarbon to form XeCF2 +• in a low-energy reaction, while simple fluorine abstraction also occurs and yields XeF+ in a higher energy but entropically favored process. The intact trifluoromethyl iodide radical cation, ICF3 +•, resulting from simple C−C cleavage, is observed as a scattered product when I+ is chosen as projectile, as are analogous ions IF+•, ICF+•, and ICF2 +, resulting from C−F and C−C bond cleavage with concomitant I−F and I−C bond formation. Multiple F-atom abstraction occurs in a single collision evidenced by the product, IF2 +. Density functional theory calculations confirm that the reactions that lead to XeF+ and XeCF+ are more endothermic than XeCF2 +• formation. The experimental observations and enthalpy calculations suggest that two reaction pathways contribute to XeF+ formation: oxidative insertion at low collision energy and formation of a fluoronium ion (−F+−) at high collision energy. The generation of XeCF2 +• products is also accounted for through an oxidative insertion mechanism. Although chemical sputtering, i.e., charge exchange with liberation of fluorocarbon cations from the surface, also occurs even at very low collision energy, it does not appear to contribute to the formation of ion/surface reaction products discussed.

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“…A mechanism previously proposed to account for the transhalogenation reaction suggests that upon collision an intermediate fluoronium ion forms at the surface, and in a concerted fashion the leaving group of the projectile is substituted onto the terminal carbon in exchange for a fluorine. 14 Although there is limited evidence to verify that this mechanism is correct for this ion/surface reaction, it does agree with evidence that shows that the energy at which modification occurs coincides with that for fluorine abstraction. For example, surface modification was unsuccessfully attempted at 30 eV collision energy, an energy at which the projectile does not show pick-up of fluorine from the surface.…”

Section: In Whichmentioning

confidence: 57%

“…Second, ion beam techniques are valuable in that mass filters can be used to deliver chemically and isotopically pure reactants to a surface. 13,14 Third, spatial control is available by masking or rastering. Finally, these experiments can be finely controlled since the kinetic energy of the ions, which determines their ability to dissociate, to react, and the extent to which they penetrate the surface can be selected.…”

mentioning

confidence: 99%

Covalent chemical modification of self- assembled fluorocarbon monolayers by low- energy CH2Br2+· ions: a combined ion/surface scattering and X-ray photoelectron spectroscopic investigation

Wade

Pradeep

Shen

et al. 1999

Rapid Commun. Mass Spectrom.

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, an indicator of terminal CF 3 to CF 2 Br conversion. X-ray photoelectron spectroscopy (XPS) was used to confirm the presence of organic bromine at the surface; Br ( 3 P 3/2 ) and Br ( 3 P 1/2 ) peaks were present at binding energies of 182 and 190 eV, respectively. XPS analysis also revealed increased surface modification at higher collision energies in these reactive ion bombardment experiments, as exemplified by the increased hydrocarbon/fluorocarbon peak ratio in the C(1s) region and incorporation of oxygen in the surface seen in the observation of an O(1s) peak.

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Mass and energy selected ion beam for deposition and ion induced surface modifications

Abstract: Simulations of sputtering induced roughening and formation of surface topography in deposition of amorphous diamond films with mass separated kiloelectronvolt ion beams

Cited by 13 publications

References 9 publications

Collisions of ions with surfaces at chemically relevant energies: Instrumentation and phenomena

Collisions of ions with surfaces at chemically relevant energies: Instrumentation and phenomena

Cleavage of C−C and C−F Bonds by Xe⁺^• and I⁺ Ions in Reactions at a Fluorinated Self-Assembled Monolayer Surface: Collision Energy Dependence and Mechanisms

Covalent chemical modification of self- assembled fluorocarbon monolayers by low- energy CH2Br2+· ions: a combined ion/surface scattering and X-ray photoelectron spectroscopic investigation

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Mass and energy selected ion beam for deposition and ion induced surface modifications

Abstract: Simulations of sputtering induced roughening and formation of surface topography in deposition of amorphous diamond films with mass separated kiloelectronvolt ion beams

Cited by 13 publications

References 9 publications

Collisions of ions with surfaces at chemically relevant energies: Instrumentation and phenomena

Collisions of ions with surfaces at chemically relevant energies: Instrumentation and phenomena

Cleavage of C−C and C−F Bonds by Xe+• and I+ Ions in Reactions at a Fluorinated Self-Assembled Monolayer Surface: Collision Energy Dependence and Mechanisms

Covalent chemical modification of self- assembled fluorocarbon monolayers by low- energy CH2Br2+· ions: a combined ion/surface scattering and X-ray photoelectron spectroscopic investigation

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Cleavage of C−C and C−F Bonds by Xe⁺^• and I⁺ Ions in Reactions at a Fluorinated Self-Assembled Monolayer Surface: Collision Energy Dependence and Mechanisms