Maskless lithography: an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer

Jangra, Mandeep; Arya, Dhairya Singh; Khosla, Robin; Sharma, Satinder K.

doi:10.1007/s00542-021-05217-0

Cited by 7 publications

(3 citation statements)

References 40 publications

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“…A geometric anti-spring system has been chosen to lower the resonant frequency [14]; i.e., anti-springs become softer and their resonant frequency becomes lower with increased input acceleration. Moreover, various methods have also been adopted to increase the sensitivity, including oblique comb electrodes utilizing both the overlapped area and the gap between the movable and stationary electrodes [15], arraying suspended piezoresistive bridges [16], choosing a piezoelectric film with a higher dielectric constant [17], and using parylene as a support diaphragm due to its very low Young's modulus [18]. Based on transducers that convert the applied acceleration perturbation into resonant frequency shifts or modal shape variations, the currently existing acceleration sensors are resonant sensors [19] and mode-localization sensors [20], respectively, where the proof mass works under a quasi-static state while the elastic beam works under a resonant state.…”

Section: Introductionmentioning

confidence: 99%

Characterization of Sensitivity of Time Domain MEMS Accelerometer

Li,

Jian,

Yang

et al. 2024

Micromachines

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This paper characterizes the sensitivity of a time domain MEMS accelerometer. The sensitivity is defined by the increment in the measured time interval per gravitational acceleration. Two sensitivities exist, and they can be enhanced by decreasing the amplitude and frequency. The sensitivity with minor nonlinearity is chosen to evaluate the time domain sensor. The experimental results of the developed accelerometer demonstrate that the sensitivities span from −68.91 μs/g to −124.96 μs/g and the 1σ noises span from 8.59 mg to 6.2 mg (amplitude of 626 nm: −68.91 μs/g and 10.21 mg; amplitude of 455 nm: −94.51 μs/g and 7.76 mg; amplitude of 342 nm: −124.96 μs/g and 6.23 mg), which indicates the bigger the amplitude, the smaller the sensitivity and the bigger the 1σ noise. The adjustable sensitivity provides a theoretical foundation for range self-adaption, and all the results can be extended to other time domain inertial sensors, e.g., a gyroscope or an inclinometer.

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Section: Introductionmentioning

confidence: 99%

Characterization of Sensitivity of Time Domain MEMS Accelerometer

Li,

Jian,

Yang

et al. 2024

Micromachines

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“…This photocurable polymer is characterized by a relatively stable viscoelastic behavior in a relatively wide temperature range [40,41]. In light of these properties, SU-8 has been already used in many studies to fabricate accelerometers [42][43][44]. Furthermore, polymeric accelerometers are characterized, in general, by high sensitivities [45,46] and ease of manufacturing [47].…”

Section: Introductionmentioning

confidence: 99%

Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers

Bernasconi,

Invernizzi,

Gallo Stampino

et al. 2023

Micromachines

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In the last few years, the manufacturing of microelectromechanical systems (MEMS) by means of innovative tridimensional and bidimensional printing technologies has significantly catalyzed the attention of researchers. Inkjet material deposition, in particular, can become a key enabling technology for the production of polymer-based inertial sensors characterized by low cost, high manufacturing scalability and superior sensitivity. In this paper, a fully inkjet-printed polymeric accelerometer is proposed, and its manufacturing steps are described. The manufacturing challenges connected with the inkjet deposition of SU-8 as a structural material are identified and addressed, resulting in the production of a functional spring-mass sensor. A step-crosslinking process allows optimization of the final shape of the device and limits defects typical of inkjet printing. The resulting device is characterized from a morphological point of view, and its functionality is assessed in performing optical readout. The acceleration range of the optimized device is 0–0.7 g, its resolution is 2 × 10−3 g and its sensitivity is 6745 nm/g. In general, the work demonstrates the feasibility of polymeric accelerometer production via inkjet printing, and these characteristic parameters demonstrate their potential applicability in a broad range of uses requiring highly accurate acceleration measurements over small displacements.

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“…Currently, sensors based on microelectromechanical systems (MEMS) are ubiquitous. The most developed sensors were micro-accelerometers and gyroscopes [1][2][3]. In such systems, reading is carried out in a purely electric manner, most often by changing the capacitance, which is not always convenient and applicable, since it requires the electrical wires for power supply and signal transmission.…”

Section: Introductionmentioning

confidence: 99%

Wideband MOEMS for the Calibration of Optical Readout Systems

Volkov

Luk’yanov

Goryunov

et al. 2021

Sensors

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The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly sensitive to the effects of oxygen plasma. This made it suitable for long-term etching in the oxygen plasma at low discharge power with the complete preservation of the original geometry, including small parts. The micromembranes were formed by thermal evaporation of Al. This simplified the technique compared to the classic UV-LIGA and guaranteed high quality and uniformity of the resulting structure. To demonstrate the complete process, a test MOEMS with electrostatic control was manufactured. On one chip, a set of micromembranes was created with different stiffness from 10 nm/V to 100 nm/V and various working ranges from 100 to 300 nm. All membranes have a flat frequency response without resonant peaks in the frequency range 0–200 kHz. The proposed technology potentially enables the manufacture of wide low-height membranes of complex geometry to create microoptic fiber sensors.

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Maskless lithography: an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer

Cited by 7 publications

References 40 publications

Characterization of Sensitivity of Time Domain MEMS Accelerometer

Characterization of Sensitivity of Time Domain MEMS Accelerometer

Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers

Wideband MOEMS for the Calibration of Optical Readout Systems

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