Masked ion damage and implantation for device fabrication

Blamire, M. G.; Kang, Dae Joon; Burnell, Gavin; Peng, Nianhua; Webb, R.P.; Jeynes, C.; Yun, Jinyoung; Moon, Seung Hyun; Oh, Byung Ho

doi:10.1016/s0042-207x(02)00303-2

Cited by 9 publications

(4 citation statements)

References 12 publications

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“…They have in common that the mask is directly deposited onto the sample's surface. Either, photoresist is used as the ion-blocking material, with etched holes defined by optical [26], e-beam [11,13,15,16] or focused ion beam lithography [27], or a deposited metal layer that is patterned by ion beam milling [28][29][30]. In contrast, the present MIBS technology provides many advantages over other methods used for nanopatterning of HTSC: (1) The desired pattern is fabricated in a single-step process, directly resulting in the as-required modification of specific portions of the material.…”

Section: Experimental Techniquesmentioning

confidence: 99%

Hysteretic Vortex-Matching Effects in High- Tc Superconductors with Nanoscale Periodic Pinning Landscapes Fabricated by He Ion-Beam Projection

et al. 2017

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Square arrays of sub-micrometer columnar defects in thin YBa2Cu3O 7−δ (YBCO) films with spacings down to 300 nm have been fabricated by a He ion beam projection technique. Pronounced peaks in the critical current and corresponding minima in the resistance demonstrate the commensurate arrangement of flux quanta with the artificial pinning landscape, despite the strong intrinsic pinning in epitaxial YBCO films. Whereas these vortex matching signatures are exactly at predicted values in field-cooled experiments, they are displaced in zero-field cooled, magnetic-field ramped experiments, conserving the equidistance of the matching peaks and minima. These observations reveal an unconventional critical state in a cuprate superconductor with an artificial, periodic pinning array. The long-term stability of such out-of-equilibrium vortex arrangements paves the way for electronic applications employing fluxons.

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Section: Experimental Techniquesmentioning

confidence: 99%

Hysteretic Vortex-Matching Effects in High- Tc Superconductors with Nanoscale Periodic Pinning Landscapes Fabricated by He Ion-Beam Projection

et al. 2017

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“…Indeed, notwithstanding annealing phenomena were observed in samples irradiated at low temperature after heating to room temperature [9], long term stability at room temperature -that is the most interesting feature for practical purpose -was verified [10].…”

Section: Introductionmentioning

confidence: 92%

Effects of 250 MeV Au-ion Irradiation on the Superconducting Properties of Ba1-xKxFe2As2 Single Crystals

et al. 2016

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In this work, we present an approach towards achieving a detailed knowledge on the effects of irradiation in iron-based superconductors with high-energy heavy ions. Ba x K x Fe 2 As 2 single crystals (x = 0.42) were irradiated with 250 MeV Au-ions. The crystals were shaped to be thin plates with thickness lower than the ion implantation depth and bases perpendicular to the c-axis. By means of the quantitative magneto-optical imaging technique we attained the local current density in pristine and irradiated sample regions without any model assumption. After irradiation a strong critical current density (J c ) enhancement was measured, overcoming a factor 3 at T = 4 K with an irradiation fluence = 9.7 10 9 cm -2 . Moreover, correlating point by point J c and induction magnetic field maps, a contribution of the Au-ion induced defects to the anisotropic out of plane pinning (i.e. pinning in the direction parallel to the ion path) turned up. This contribution shows a maximum at applied fields quite lower than the nominal dose equivalent field. Furthermore, the temperature dependence of the penetration depth was evaluated before and after high-fluence irradiations by investigating the high-frequency behavior of these crystals using a microwave coplanar resonator technique. Fitting the experimental curves with a power law, we found a decrease of the power exponent, more pronounced at the higher fluences, that can supports the s ± wave model.

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“…Some of the previous experiments have used a variant of the stencil technique by using a pre-patterned layer of photoresist with etched voids [15,16,17,18] or a deposited metal layer that is patterned by ion beam milling [19,20] as the ion-blocking material. By irradiating YBCO with 200 keV Ne + [16] or 100 keV O + [17] ions through a 20 nm wide slit in the photoresist the fabrication of Josephson junctions has been demonstrated.…”

Section: Introductionmentioning

confidence: 99%

Nano-patterning of cuprate superconductors by masked He+ ion irradiation: 3-dimensional profiles of the local critical temperature

Mletschnig

Lang

2019

Microelectronic Engineering

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Irradiation of cuprate high-T c superconductors with light ions of moderate energy creates point defects that lead to a reduction or full suppression of the critical temperature. By shaping the ion flux with a stencil mask, nanostructures for emerging superconducting electronics can be fabricated. The 3-dimensional shape of such defect landscapes is examined, based on calculations of full collision cascades and atom displacements. A relation between the calculated defect density and experimental values of the critical temperature T c in thin YBa 2 Cu 3 O 7−δ films is etablished that allows to determine the distribution of local T c 's and its 3-dimensional visualization. The results confirm that, using 75 keV He + ion irradiation and a stencil mask, well-defined patterns of non-superconducting material in the superconducting matrix can be produced with low blurring.

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Masked ion damage and implantation for device fabrication

Cited by 9 publications

References 12 publications

Hysteretic Vortex-Matching Effects in High- Tc Superconductors with Nanoscale Periodic Pinning Landscapes Fabricated by He Ion-Beam Projection

Hysteretic Vortex-Matching Effects in High- Tc Superconductors with Nanoscale Periodic Pinning Landscapes Fabricated by He Ion-Beam Projection

Effects of 250 MeV Au-ion Irradiation on the Superconducting Properties of Ba1-xKxFe2As2 Single Crystals

Nano-patterning of cuprate superconductors by masked He+ ion irradiation: 3-dimensional profiles of the local critical temperature

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