Mask Chemical Micromachining of Cylindrical Array Structures on Copper Substrates

Abstract

Abstract:The microarray structured surfaces in the nature, such as shark skin and lotus leaf, have good waterproof and anti-friction performances. Besides, the microarray structures above also have good application prospects in heat exchange and biomedicine. Compared to traditional machining with problems of high cost and low efficiency, the mask chemical etching method has the advantages that no residual stress exists when processing, and can be employed for large area preparation with high machining efficiency. We propose to prepare micro cylindrical array structures on copper substrate by mask chemical etching method, and research influences of processing parameters on the size of microarray structures.