Marvelous MEMs

Bryzek, Janusz; Roundy, Shad; Bircumshaw, Brian L.; Chung, Charles C.; Castellino, Kenneth; Stetter, Joseph R.; Vestel, Michael J.

doi:10.1109/mcd.2006.1615241

Cited by 75 publications

(28 citation statements)

References 41 publications

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“…New developments in MEMS sensors are trying to address these difficult measurement tasks. 103 With unique combined advantages of high sensitivity, small size, and low power consumption, the amperometric gas sensor is uniquely suited for environmental applications, but it is often challenged with sensitivity or selectivity demands not encountered in other applications. For example, the amperometric sensors based on stabilized zirconia have been developed for the detection of oxygen-containing gases like NO x or combustible gases such as CO, H 2 , and hydrocarbons; 104 for NO x detection; 105 for lean combustion gas control; 106 and for selective detection of propane.…”

Section: Environmentmentioning

confidence: 99%

Amperometric Gas SensorsA Review

2008

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Section: Environmentmentioning

confidence: 99%

Amperometric Gas SensorsA Review

2008

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“…T HE DEVELOPMENT of microelectromechanical systems (MEMS) has seen mechanical phenomena used as the basis for a wide range of sensing technologies [1], [2]. MEMS are miniature mechatronic systems produced using microfabrication techniques [3].…”

Section: Introductionmentioning

confidence: 99%

Feedback-Controlled MEMS Force Sensor for Characterization of Microcantilevers

Moore

Coşkun

Alan

et al. 2015

J. Microelectromech. Syst.

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This paper outlines the design and characterization of a setup used to measure the stiffness of microcantilevers and other small mechanical devices. Due to the simplicity of fabrication, microcantilevers are used as the basis for a variety of mechanical sensor designs. In a range of applications, knowledge of the stiffness of microcantilevers is essential for the accurate calibration of the sensors in which they are used. Stiffness is most commonly identified through measurement of the microcantilever's resonance frequency, which is applied to an empirically derived model. This paper uses a microelectromechanical system (MEMS)-based force sensor to measure the forces produced by a microcantilever when deformed and a piezoelectric tubebased nanopositioner to displace the microcantilever. A method of calibrating the force sensor is presented that takes advantage of the lumped nature of the mechanical system and the nonlinearity of MEMS electrostatic drives.[2014-0183]

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“…However, better accuracy of around 1% or, typically, an accuracy of one-tenth of a second is achieved with a technology based on inertial navigation or simply acceleration measurement. With the progress in microelectromechanical-system (MEMS) sensor technology it has become possible to construct accelerometer meeting the cost and size demands needed for low-cost commercial electronics [5,6]. This technology is the focus of our study and related work can be found in earlier studies [7,8].…”

Section: Introductionmentioning

confidence: 99%