Manufacturing and Macroscopic Properties of Cold Sprayed Cu-Ga Coating Material for Sputtering Target

Abstract

This study attempted to manufacture a Cu-Ga coating layer via the cold spray process and to investigate the applicability of the layer as a sputtering target material. In addition, changes made to the microstructure and properties of the layer due to annealing heat treatment were evaluated, compared, and analyzed. The results showed that coating layers with a thickness of 520 mm could be manufactured via the cold spray process under optimal conditions. With the Cu-Ga coating layer, the α-Cu and Cu 3 Ga were found to exist inside the layer regardless of annealing heat treatment. The microstructure that was minute and inhomogeneous prior to thermal treatment changed to homogeneous and dense with a more clear division of phases. A sputtering test was actually conducted using the sputtering target Cu-Ga coating layer (~2 mm thickness) that was additionally manufactured via the cold-spray coating process. Consequently, this test result confirmed that the cold sprayed Cu-Ga coating layer may be applied as a sputtering target material.

Microscopic Examination of Cold Spray Cermet Sn+In2O3Coatings for Sputtering Target Materials

“…Despite the application potential of the cold spraying method for the sputtering target production, the number of scientific articles in this field is strongly limited. To the best of our knowledge there are only two papers describing the implementation of the cold spray process in metallic sputtering target material manufacturing [ 36 , 37 ]. No studies have yet been published on the manufacture of thick coating layers using cold spray deposition as transparent conductive oxides (TCOs) sputtering target materials.…”

Manufacturing and Macroscopic Properties of Warm Sprayed Cu-36at.%In-15at.%Ga Coating Layer

“…Hardness also decreased from 304Hv (as sprayed) to 258Hv (400°C) as heat treatment was applied. The findings of decreased porosity (increased density) and hardness of the warm sprayed CIG coating layer are estimated to have been caused by the evolution of the microstructure such as recovery, recrystallization and crystal growth as heat treatment temperature increased [8].…”