“…Some of these species are not included in other databases. Li [18] and Kang [19] SiH 2 Cl 2 Peng [20] and He [21] SiH 2 Cl 2 , SiH 3 Cl Wang [4] SiH 2 Cl 2 , SiCl 2 Xu [22] and Miao [23] SiH 2 Cl 2 , SiH 3 Cl, SiCl 2 Niederkorn [6] SiH 2 Cl 2 , SiH 3 Cl, SiCl 2 , SiCl, SiH 4 Sirtl [5] SiH 2 Cl 2 , SiH 3 Cl, SiCl 2 , SiCl, SiH 4 , SiCl 3 Chernyavsky [7] and Diana [8] SiH 2 Cl 2 , SiH 3 Cl, SiCl 2 , SiCl, SiH 4 , SiCl 3 , some other species only existing at high temperature and radicals such as Si(g), SiH, H, Cl NIST-JANAF thermochemical tables [10] Matheson gas data book [11] Thermochemical data of elements and compounds [12] HSC Data compilation tables of properties of pure compounds [13] Aspen Gmelin handbook of inorganic and organometallic chemistry [14] Chemkin Practical handbook of thermodynamic data for inorganic compounds [15] Others [16,17] Thus, JANAF is recommended as a reliable database for C p data of the Si-H-Cl system.…”