Thermodynamic analysis of manufacturing polysilicon from SiHCl3, SiCl4 and H2

Model Predictive Control (MPC)-Based Supervisory Control and Design of Off-Gas Recovery Plant with Periodic Disturbances from Parallel Batch Reactors

“…There have been many studies to identify the kinetics , and thermodynamics of manufacturing polysilicon . Because the CVD reaction mechanism of silicon is complex, with many radicals being formed, it is difficult to obtain all of the kinetic parameters .…”

“…There have been many studies to identify the kinetics 11,12 and thermodynamics of manufacturing polysilicon. 2 Because the CVD reaction mechanism of silicon is complex, with many radicals being formed, it is difficult to obtain all of the kinetic parameters. 13 However, five reactions related to the inputs and outputs are sufficient to describe the CVD reactor in this study.…”

“…Hence, proper dynamic models are necessary for the analysis of the economy and safety of various operation scenarios. Although a significant amount of studies exist on the polysilicon manufacturing process, most of them are focused only on thermodynamic analysis and the reactor systems. , Many control studies, which are based on first-principles plant models, focus on the operability and controllability of a specific portion of the plant or several units without considering the real-plant scale and plant–model mismatch. Moreover, most works in the area of plantwide control have focused on controller design using a steady-state model.…”

Hydrodynamic behaviors of an internally circulating fluidized bed with wide-size-distribution particles for preparing polysilicon granules

“…The production of polysilicon in an FBR greatly increases as the effective deposition area of particles in an FBR is 2-3 orders of magnitude higher than that of the silicon rods in a Siemens bell jar reactor. In addition, our previous studies showed that zero net by-production of SiCl 4 can be realized in an FBR, thus the production process can be significantly simplified [3,4].…”

Raman Spectroscopy Characterization of Dissolved Polysilicon Byproduct SiCl4 in Ionic Liquids

“…There are two main ways for the comprehensive utilization of SiCl 4 internationally: one uses SiCl 4 as a raw material to produce chemicals, such as white carbon black, silicate ester, optical fiber, and organic silicon [2,3] and the other directly converts SiCl 4 to SiHCl 3 for recycling [4][5][6].…”