Manipulation of inverted and direct opals by a focused ion beam scanning electron microscope (FIB SEM)

Magni, Simone; Milani, M.; Tatti, Francesco; Savoia, Claudio

doi:10.1088/1742-6596/126/1/012059

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2010

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“…Some preliminary results were presented in the conference paper Ref. [ 21 ], here our findings are presented in full.…”

Section: Introductionmentioning

confidence: 84%

Creation of Controlled Defects Inside Colloidal Crystal Arrays with a Focused Ion Beam

Magni

Milani

2010

Nanoscale Res Lett

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In this work the reliability of the focused-ion-beam (FIB) patterning on polystyrene (PS) colloidal crystals at different scales is determined. Ordered arrays of PS spheres (465 nm) are successfully modified by selectively removing a single sphere. The water-vapor assisted FIB milling is crucial to obtain this result. Furthermore, isolated PS spheres are FIB drilled with or without chemically enhanced milling aiming at the exploration of the limits of such a technique. These controlled defects created using the FIB-assisted techniques may be helpful in preparing mockups of photonic crystals, sensors or as colloidal masks for diverse lithographic processes.

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“…Some preliminary results were presented in the conference paper Ref. [ 21 ], here our findings are presented in full.…”

Section: Introductionmentioning

confidence: 84%

Creation of Controlled Defects Inside Colloidal Crystal Arrays with a Focused Ion Beam

Magni

Milani

2010

Nanoscale Res Lett

View full text Add to dashboard Cite

show abstract

Manipulation of inverted and direct opals by a focused ion beam scanning electron microscope (FIB SEM)

Cited by 1 publication

References 10 publications

Creation of Controlled Defects Inside Colloidal Crystal Arrays with a Focused Ion Beam

Creation of Controlled Defects Inside Colloidal Crystal Arrays with a Focused Ion Beam

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