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2019
DOI: 10.1007/s12034-018-1706-z
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Maleic anhydride film deposition through an active screen plasma system

Abstract: The active screen plasma system has been extensively studied over the past few years, mainly for plasma nitriding purposes. This technique also provides possibilities of treating non-electrical conducting materials, such as polymeric ones, which is unattainable with a conventional DC plasma system. In this work, an active screen plasma setup for maleic anhydride (MA) film deposition on a glass substrate was used. The plasma working gas was a mixture of argon and MA vapour. Films obtained through conventional p… Show more

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Cited by 7 publications
(3 citation statements)
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“…Maleic anhydride (MA) is a multifunctional and biocompatible polymer that can be deposited by plasma polymerization [ 12 ]. In order to maximize the retention of functional groups in plasma-polymerized p(MA) films, a critical balance of plasma parameters should be selected with low nominal power or low pulsing times [ 13 , 14 , 15 ]. The film formation is governed by gas-phase dissociation and growth processes, which need to be narrowly controlled in parallel with complex interactions in the plasma reactor [ 16 , 17 ].…”
Section: Introductionmentioning
confidence: 99%
“…Maleic anhydride (MA) is a multifunctional and biocompatible polymer that can be deposited by plasma polymerization [ 12 ]. In order to maximize the retention of functional groups in plasma-polymerized p(MA) films, a critical balance of plasma parameters should be selected with low nominal power or low pulsing times [ 13 , 14 , 15 ]. The film formation is governed by gas-phase dissociation and growth processes, which need to be narrowly controlled in parallel with complex interactions in the plasma reactor [ 16 , 17 ].…”
Section: Introductionmentioning
confidence: 99%
“…The pulsed plasma polymerization of three different precursors (acetylene [Ac], acrylic acid [AA], maleic anhydride [MA]) was shown to be a promising method, and the chemical retention depends on the plasma chamber. [3,4,[18][19][20][21][22][23] Their corresponding plasma polymers adhered onto various substrates, mostly metallic ones for the pp-Ac [24][25][26] and polymeric ones for the other two precursors. [27,28] Therefore, here, the study was extended to other plasma parameters alone or combined (pulsed or continuous wave at different discharge powers, durations, etc.)…”
Section: Introductionmentioning
confidence: 99%
“…Plasma deposition procedure is a promising technique that can be used to supply thin films, aiming at applications such as magnetron sputtering, [ 2,3,6,10,12,18,35–37 ] hollow cathode, [ 41,42 ] active screen, [ 43–45 ] and plasma electrolytic. [ 37,46–50 ] The cathodic cage deposition process has been used for the deposition of thin films with improved physical–chemical properties with well‐defined compositions such as iron nitride, [ 51–53 ] titanium nitride, [ 54–57 ] titanium oxide, [ 58 ] copper oxide, [ 59–61 ] and molybdenum nitride.…”
Section: Introductionmentioning
confidence: 99%