Magnetron sputter deposition onto fluidized particle beds

Baechle, Daniel M.; Demaree, J. D.; Hirvonen, James K.; Wetzel, Eric D.

doi:10.1016/j.surfcoat.2013.01.032

Cited by 9 publications

(2 citation statements)

References 26 publications

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“…it does not suggest any shielding objects between the treated surface and the sputtered material. Mechanical separation of particles from each other with the use of vibrations of different frequencies was applied in [10,27,34,[46][47][48]. Magnetron sputtering allowed uniform coatings to be deposited on 10-100-µm particles, but the results with particles smaller than 10 µm were poor, because the problem of dispersing small particles had not been solved completely.…”

Section: Application Of Dusty Plasma For Productionmentioning

confidence: 99%

Application of dusty plasma for production of disperse composite materials

et al. 2015

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Objectives and achievements of the production of disperse composite materials (DCMs) which consist of particles with a metal coating are represented. The prospects of the DCM production by the dusty plasma method based on confining a cloud of micron-sized particles in a discharge plasma and on magnetron sputtering are shown. The method was tested in the preparation of catalyst materials, a superhard diamond polycrystalline material, and a polyquasicrystalline material with a low friction coefficient. The results of investigations of the structure and properties of powdered and sintered DCMs are presented.

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Section: Application Of Dusty Plasma For Productionmentioning

confidence: 99%

Application of dusty plasma for production of disperse composite materials

et al. 2015

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“…Another factor that can affect the course of the reaction is surface modification of the prepared precursors -mechanocomposites -by depositing thin films on them. It should be noted that the deposition of thin films on particles has become one of the more promising directions in the modification of powder materials (Xu et al, 2007;Akamaru et al, 2006;Shishkin et al, 2018;Lv et al, 2009;Baechle et al, 2013).…”

Section: Introductionmentioning

confidence: 99%

In situ phase formation during high-temperature synthesis in clad mechanocomposites based on the Ti–Al system

Логинова¹,

Собачкин²,

Ситников³

et al. 2022

J Synchrotron Radiat

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An in situ synchrotron experimental study of phase formation dynamics in clad mechanocomposites of Ti–Al systems during high-temperature synthesis was performed. Cladding of the obtained mechanocomposites was carried out with an SiO2 target, with a deposition time of 40 min. The high-temperature synthesis was performed using the thermal explosion method based on a microwave induction heater in the in situ mode on an experimental setup adapted to synchrotron radiation time-resolved diffractometry. The influence of the cladding on the macrokinetic parameters of synthesis in situ was investigated experimentally. It was found that for an ignition temperature T ig = 650 ± 10°C, the maximum synthesis temperatures were in the range T max = 1380–1465°C. The characteristic heating speed was 525 K min−1. The sequence and temperature–time interval of phase formation are determined. The formation of the TiAl, TiAl3 and Ti3Al compounds begins at T = 661°C. At T max = 1465.6°C, the synthesis product is multiphase, the structures of the formed TiAl3 (content about 70%) and TiAl (content about 25%) have a nonequilibrium state. At the stage of system annealing with T = 1384.9°C, the reaction of the components occurs with the formation of almost monophase TiAl (content of more than 90%); Ti occupies the rest.

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