Surface active agent (surfactant) effect of the adsorbed oxygen atoms on epitaxial growth of fcc ultra thin films (Co, γ -Fe, Cr) on Cu(001), a Co/γ -Fe/Co trilayer on Cu(001) and a [Co/Cu] multilayer was investigated. The surfactant effect of oxygen atoms on the growth of fcc Co on Cu(001)-O reconstructed structure of (2 √ 2 × √ 2)R45 • was found by the RHEED observation. The non-equilibrium fcc structure of Fe was stable until 45 ML on the Cu(001)-O surface formed on Cu(001) single crystal, but 20 ML on the Cu(001)-O surface formed on Cu(001) buffer layer deposited on MgO(001). The surfactant effect was not observed for the non-equilibrium fcc Cr. The surfactant effect of oxygen atoms on the Co/γ -Fe/Co trilayer and [Co/Cu] 20 multilayer were observed. The surface reconstruction structure of Cu (001)• is necessary for the oxygen surfactant effect on the epitaxial growths of fcc metals on Cu(001).