Abstract:This paper presents the fabrication of highperformance micro-magnets for the electromagnetic transduction of MEMS. The fabrication method relies on the use of nickel microstructures electroplated onto silicon substrates to control the capillary assembly of cobalt nanorods via magnetophoresis under an external magnetic field. The resulting sub-millimeter size permanent magnets with thicknesses of up to 150 µm produce a stray field of 30 mT at a distance of 100 µm. We demonstrate that this magnetic induction is … Show more
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