Magneto-Mechanical MEMS Sensors for Bio-Detection

Ramasamy, M.; Cai, Liang; Prorok, Barton C.

doi:10.1007/978-1-4419-8825-6_2

Cited by 7 publications

(5 citation statements)

References 14 publications

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“…In recent years, some researchers have found that mass sensitivity is strongly dependent on the mass load position/distribution and the resonance modes of an MS. Ramasy et al reported that the same mass load attached at different positions on an MS can give rise to different mass sensitivity [ 18 ]. Particularly, there exists a “nodal point” where the point displacement as well as the mass sensitivity is zero when the mass is loaded on it.…”

Section: Introductionmentioning

confidence: 99%

Mass Load Distribution Dependence of Mass Sensitivity of Magnetoelastic Sensors under Different Resonance Modes

Zhang

Chai

2015

Sensors

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Magnetoelastic sensors as an important type of acoustic wave sensors have shown great promise for a variety of applications. Mass sensitivity is a key parameter to characterize its performance. In this work, the effects of mass load distribution on the mass sensitivity of a magnetoelastic sensor under different resonance modes were theoretically investigated using the modal analysis method. The results show that the mass sensitivity and “nodal point” positions are related to the point displacement, which is determined by the motion patterns. The motion patterns are affected by resonance modes and mass load distribution. Asymmetrical mass load distribution causes the motion patterns lose symmetry and leads to the shift of “nodal point”. The mass sensitivity changing with mass load distribution behaves like a sine wave with decaying amplitude and the minimum mass sensitivity appears at the first valley. This study provides certain theoretical guidance for optimizing the mass sensitivity of a magnetoelastic sensor or other acoustic wave based sensors.

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Section: Introductionmentioning

confidence: 99%

Mass Load Distribution Dependence of Mass Sensitivity of Magnetoelastic Sensors under Different Resonance Modes

Zhang

Chai

2015

Sensors

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“…High-performance resonating sensors have attracted interest for many MEMS applications, especially in the field of biological species detection. 1 For such applications, the surface of the sensor is functionalized to specifically bind to a target analyte. Binding of the target causes a change in the resonant frequency, which, in turn, enables analyte detection and quantification.…”

Section: Microfabrication Of Magnetostrictive Beams Based On Nife Filmentioning

confidence: 99%

Microfabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems

Alfadhel

Gianchandani

Kosel

2012

Journal of Applied Physics

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This paper reports the development of integrated micro-sensors consisting of 1 -µm-thick magnetostrictive cantilevers or bridges with 500 µm in length and conducting interrogation elements. The thin films are fabricated by sputter deposition of NiFe doped with B and Mo, and the magnetic properties are enhanced by field annealing, resulting in a coercivity of 2.4 Oe. In operation, an alternating current applied to the interrogation elements magnetizes the magnetostrictive structures. The longitudinal resonant frequency is detected as an impedance change of the interrogation elements. The magnetostrictive micro-beams provide high resonant frequencies—2.95 MHz for the cantilever and 5.46 MHz for the bridge—which can be exploited to develop sensors of high sensitivity.

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“…Micro-Electro-Mechanical Systems (MEMS) have attracted considerable interest in using their unique properties over the last few decades. These small machines can be used as sensors, actuators, and resonators (Bhattacharyya et al 2008;Li et al 2009;Park et al 2012;Ramasamy et al 2011). Due to their low cost and high efficiency, MEMS are implemented in several applications such as in aerospace (Bhat et al 2014), biochemistry (Lavrik et al 2004), environment (Waggoner and Craighead 2007) and medicine (Ganesan 2013;Gau et al 2001;Ilic et al 2001;Park et al 2011).…”

Section: Introductionmentioning

confidence: 99%

Theoretical study of an electrostatically actuated torsional microsensor for biological applications

Bouchaala

2017

Microsyst Technol

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MEMS mass sensors can operate in different regimes. The static method is the classical technique to measure physical quantities, and it is based on measuring the static deflection of the microstructure upon mass binding (Schmid et al. 2010;Wu et al. 2001). The dynamic method is considered as the most sensitive technique for mass sensing (Park et al. 2011; Bouchaala et al. 2016a, b, c;Gupta et al. 2004). The fundamental principle of the dynamic MEMS mass sensor is to excite the microstructure near one of its natural frequencies, which is a function of the structure stiffness and mass. By adding a small mass on the top of the resonator, the natural frequency downshifts. Based on analytical and experimental techniques, the sensitivity of the MEMS resonator can be calculated, and hence the frequency shift can be transformed into a measurable mass quantity.Different investigations have been conducted to measure the sensitivity of MEMS mass sensors. Ilic et al. (2001) fabricated nanoelectromechanical oscillators for mass sensing applications. An analytical model is developed to investigate the effect of the added mass on the nano-cantilever beam. Subattogram sensitivity is demonstrated under vacuum conditions. Burg et al. (2006) designed and fabricated an electrostatically actuated biomolecular mass sensor. The transducer is a vacuum packaged suspended microchannel for mass sensing in liquid. Schmid et al. ( 2010) developed a real-time approach for mass and position determination by using a resonant micro string. It consists of measuring the frequency shift of the first two bending modes. Electrostatically actuated torsional microsensor is a very promising structure for mass sensing due to the ability to be actuated from one side and exposed for sensing in the other side. In

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Magneto-Mechanical MEMS Sensors for Bio-Detection

Cited by 7 publications

References 14 publications

Mass Load Distribution Dependence of Mass Sensitivity of Magnetoelastic Sensors under Different Resonance Modes

Mass Load Distribution Dependence of Mass Sensitivity of Magnetoelastic Sensors under Different Resonance Modes

Microfabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems

Theoretical study of an electrostatically actuated torsional microsensor for biological applications

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