“…However, preparation of in-plane c-axis highly aligned BaM films has always been a challenge, and the influence of various processing parameters remains unclear. Although high-quality inplane c-axis oriented BaM films have been successfully prepared using pulsed laser deposition (PLD) 12,[14][15][16] and liquid phase epitaxy (LPE) 11,[17][18][19] techniques, these methods, however, require expensive equipment. In our previous study, inplane c-axis oriented BaM films were fabricated using DC magnetron sputtering, a proven cost-effective method suitable for industrial production, which has a higher deposition rate than radio-frequency (RF) magnetron sputtering.…”