Oxide based ferromagnet/semiconductor heterostructures offer substantial advantages for spin electronics. We have grown (111) oriented Fe3O4 thin films and Fe3O4/ZnO heterostructures on ZnO(0001) and Al2O3(0001) substrates by pulsed laser deposition. High quality crystalline films with mosaic spread as small as 0.03• , sharp interfaces, and rms surface roughness of 0.3 nm were achieved. Magnetization measurements show clear ferromagnetic behavior of the magnetite layers with a saturation magnetization of 3.2 µB/f.u. at 300 K. Our results demonstrate that the Fe3O4/ZnO system is an intriguing and promising candidate for the realization of multi-functional heterostructures.PACS numbers: 81.15.Fg, 75.50.Dd In spin electronics the spin degree of freedom is exploited to realize electronic devices with novel or superior functionality [1,2]. For semiconductor spintronic devices, charge carrier populations with a controllable spin polarization must be created within conventional semiconductors. A seemingly straightforward approach to do so is to inject spin polarized carriers from a ferromagnetic electrode into the semiconductor material. Unfortunately, the large conductivity mismatch between conventional metallic 3d ferromagnets and semiconductors prevents an efficient spin injection [3]. This problem can be circumvented e.g. via the introduction of Schottky or tunnel barriers at the ferromagnet/semiconductor (FM/SC) interface [4]. An alternative approach is to use ferromagnetic materials with very high spin polarization and small conductivity mismatch with semiconductors. Ferromagnets with a spin polarization of 100% -so-called half metals -thus are most interesting. The oxide ferrimagnet Fe 3 O 4 , onto which we focus here, is a half metal according to band structure calculations [5], and a spin polarization of up to -(80 ± 5) % has been reported from spin-resolved photoelectron spectroscopy experiments in (111)-oriented Fe 3 O 4 [6,7]. Furthermore, the conductivity σ ≈ 200 Ω −1 cm −1 of Fe 3 O 4 at room temperature is low [8], while the Curie temperature T C 860 K is well above room temperature, making Fe 3 O 4 a promising material for spin injection into semiconductors. However, the Fe 3 O 4 /semiconductor heterostructures investigated so far [9,10,11,12,13,14] show that for both group IV and III-V semiconductors, it is very difficult to grow Fe 3 O 4 thin films with high crystalline quality, while preventing the formation of secondary phases at the FM/SC interface. To our knowledge, the deposition of Fe 3 O 4 onto a II-VI semiconductor has not been reported to date.In this letter, we show that (111)-oriented Fe 3 O 4 can be epitaxially grown onto the II-VI semiconductor ZnO using pulsed laser deposition (PLD). Furthermore, we demonstrate the epitaxial growth of ZnO thin films onto (111)-oriented Fe 3 O 4 . The FM/SC heterostructures thus obtained are characterized using x-ray diffraction (XRD), atomic force microscopy (AFM), transmission electron microscopy (TEM), and superconducting quantum interference devic...