Magnetics on Silicon: An Enabling Technology for Power Supply on Chip

Mathúna, S. Cian Ó; O’Donnell, Terence; Wang, Ningning; Rinne, K.

doi:10.1109/tpel.2005.846537

Cited by 137 publications

(68 citation statements)

References 34 publications

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“…Electrodeposition is widely used method to prepare thick films of ferromagnetic metals and alloys such as permalloy for use as cores or shields in thin film heads 1 or cores in on-chip inductors. 2 The application of a magnetic field during deposition of these ferromagnetic metals or alloys may introduce crystallographic or atomic-scale texture, which can influence the anisotropy and magnetic reversal in the electrodeposited material. [3][4][5] More recently, there have been reports of structuring of electrodeposits from paramagnetic solutions such as Cu 2þ using nonuniform magnetic fields produced by permanent magnets, 6,7 or soft iron, which is magnetized in an external field.…”

Section: Magnetic Structuring Of Linear Copper Electrodepositsmentioning

confidence: 99%

Magnetic structuring of linear copper electrodeposits

Dunne¹,

Soucaille²,

Ackland³

et al. 2012

Journal of Applied Physics

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Section: Magnetic Structuring Of Linear Copper Electrodepositsmentioning

confidence: 99%

Magnetic structuring of linear copper electrodeposits

Dunne¹,

Soucaille²,

Ackland³

et al. 2012

Journal of Applied Physics

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“…On-chip or similar-scale inductors built for power converters in the multi-megahertz region include [22]- [39] and are reviewed in [40], [41]. With sufficiently small volume, the magnetics can be embedded in the substrate of the power circuit or within a secondary substrate and flip-bonded above the power circuit.…”

Section: Magnetics Technologymentioning

confidence: 99%

A Technology Overview of the PowerChip Development Program

Araghchini

Chen

Doan-Nguyen

et al. 2013

IEEE Trans. Power Electron.

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Abstract-The PowerChip research program is developing technologies to radically improve the size, integration, and performance of power electronics operating at up to grid-scale voltages (e.g., up to 200 V) and low-to-moderate power levels (e.g., up to 50 W) and demonstrating the technologies in a high-efficiency light-emitting diode driver, as an example application. This paper presents an overview of the program and of the progress toward meeting the program goals. Key program aspects and progress in advanced nitride power devices and device reliability, integrated highfrequency magnetics and magnetic materials, and high-frequency converter architectures are summarized.Index Terms-Gallium nitride, high frequency (HF), integrated magnetics, integrated power converter, light-emitting diode (LED) driver, PwrSoC.

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“…Micro-inductors for power electronics is an emerging application in which inductors are used as energy storage elements for switched mode power supplies (SMPS). Miniaturization of SMPS has become the main focus for developing future generation power supplies, that is, power supply in package (PwrSiP) and power supply on chip (PwrSoC) [8][9][10] . The PwrSoC vision is to integrate all power electronics components on one chip.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of 3D air-core MEMS inductors for very-high-frequency power conversions

Thanh

Mizushima²,

Nour

et al. 2018

Microsyst Nanoeng

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We report a fabrication technology for 3D air-core inductors for small footprint and very-high-frequency power conversions. Our process is scalable and highly generic for fabricating inductors with a wide range of geometries and core shapes. We demonstrate spiral, solenoid, and toroidal inductors, a toroidal transformer and inductor with advanced geometries that cannot be produced by wire winding technology. The inductors are embedded in a silicon substrate and consist of through-silicon vias and suspended windings. The inductors fabricated with 20 and 25 turns and 280-350 μm heights on 4-16 mm 2 footprints have an inductance from 34.2 to 44.6 nH and a quality factor from 10 to 13 at frequencies ranging from 30 to 72 MHz. The air-core inductors show threefold lower parasitic capacitance and up to a 140% higher-quality factor and a 230% higher-operation frequency than silicon-core inductors. A 33 MHz boost converter mounted with an air-core toroidal inductor achieves an efficiency of 68.2%, which is better than converters mounted with a Si-core inductor (64.1%). Our inductors show good thermal cycling stability, and they are mechanically stable after vibration and 2-m-drop tests.

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Magnetics on Silicon: An Enabling Technology for Power Supply on Chip

Cited by 137 publications

References 34 publications

Magnetic structuring of linear copper electrodeposits

Magnetic structuring of linear copper electrodeposits

A Technology Overview of the PowerChip Development Program

Fabrication of 3D air-core MEMS inductors for very-high-frequency power conversions

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