Magnetically induced oscillations on a conductive cantilever for resonant microsensors

Angelis, C. De; Ferrari, Vittorio; Marioli, D.; Sardini, Emilio; Serpelloni, Mauro; Taroni, A.

doi:10.1016/j.sna.2006.06.049

Cited by 14 publications

(6 citation statements)

References 13 publications

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“…In this section, a brief overview of both the contactless actuation principle and the remote readout strategy is presented; more details can be found in [7][8][9].…”

Section: Working Principle: a Brief Overviewmentioning

confidence: 99%

“…The device has been fabricated at CNM, Barcelona, Spain by adopting a BESOI (bulk and etch silicon on insulator) micromachining technology. The interrogation contactless working principle, previously studied by the authors [5][6][7], consists of an actuation principle based on the exploitation of Lorentz forces generated by the interaction between a time-varying magnetic field and the eddy-currents that this magnetic field induces onto a conducting surface. The detection strategy is based on probing the magnetic field induced on the conductive surface of the resonator.…”

Section: Introductionmentioning

confidence: 99%

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Numerical and experimental investigation on contactless resonant sensors

Andò

Baglio

Baù

et al. 2010

Sensors and Actuators A: Physical

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This paper reports numerical and experimental investigation on a (bulk and etch silicon on insulator) BESOI MEMS device. The implemented contactless actuation principle, exploits Lorentz forces exerted on a conductive-non magnetic surface of the sensor. These forces derive from the interaction between the eddy-currents and the radial magnetic field, both generated by a sinusoidally driven external inductor.\ud Both excitation and readout strategies are performed remotely via a magnetic strategy. The sensor proposed here has been first analytically and numerically studied by using CoventorWareTM 2008, then the device prototype has been fabricated and a preliminary experimental campaign has been performed to characterize the system in terms of variation of its resonance frequency against changes in the sensor mass

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“…In this section, a brief overview of both the contactless actuation principle and the remote readout strategy is presented; more details can be found in [7][8][9].…”

Section: Working Principle: a Brief Overviewmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Numerical and experimental investigation on contactless resonant sensors

Andò

Baglio

Baù

et al. 2010

Sensors and Actuators A: Physical

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“…According to (2), to excite a vibration mode of a resonator at frequency ω r , the excitation coil must be driven at frequency ω e so that ω r =2ω e [5]. Fig.…”

Section: Theorymentioning

confidence: 99%

Contactless Excitation and Readout of Passive Sensing Elements Made by Miniaturized Mechanical Resonators

et al. 2007

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Mechanical resonance has been contactless excited and detected in conductive nonmagnetic structures to be used as sensors without the need for external magnets, or electrical connections to the structure to supply current lines. An external coil generates a magnetic field at frequency f that induces eddy currents in the structure. The interaction between the eddy currents and the magnetic field itself causes Lorentz forces at frequency 2f that can set the structure into resonance. An additional dual-coil arrangement applies and senses a probing magnetic field at higher frequency and exploits it to measure the resonator vibrations. The principle was tested on millimeter-size metallic beams, obtaining operation distances in the order of 1 cm and values of the resonant frequencies in agreement with measurements taken by an optical system. The resulting resonators can be used as passive sensing elements for a variety of quantities, being especially attractive for harsh and inaccessible environments.

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“…The transduction contactless working principle, previously studied by the authors [5,6,7] consists on an actuation principle based on Lorentz force source and a detection principle realized by a carrier signal and a pick-up coil in a differential configuration.…”

Section: Introductionmentioning

confidence: 99%

“…The interaction between the eddy currents and the radial component of the magnetic field (B r ) spreads a Lorentz force per unit of volume that moves the conductive beam in the z direction. The force along the z axis (F z ), can be expressed as follow [7,8]:…”

mentioning

confidence: 99%

Numerical and Experimental Investigation on Contactless Resonant Sensors

et al. 2009

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This paper reports numerical and experimental investigation on a BESOI-MEMS device. The implemented contactless actuation principle exploits Lorentz forces exerted on a conductive-non magnetic surface of the sensor, deriving from interaction between the eddy currents and the radial magnetic field, both generated by a sinusoidally driven external inductor. Both excitation and readout strategies are performed remotely via a magnetic strategy; moreover, the conceived sensor has been first numerically studied by using CoventorWare ™ 2008, then the device prototype has been fabricated and a preliminary experimental campaign has been performed to characterize the system in terms of variation of its resonance frequency.

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Magnetically induced oscillations on a conductive cantilever for resonant microsensors

Cited by 14 publications

References 13 publications

Numerical and experimental investigation on contactless resonant sensors

Numerical and experimental investigation on contactless resonant sensors

Contactless Excitation and Readout of Passive Sensing Elements Made by Miniaturized Mechanical Resonators

Numerical and Experimental Investigation on Contactless Resonant Sensors

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