Numerical and Experimental Investigation on Contactless Resonant Sensors

Abstract

This paper reports numerical and experimental investigation on a BESOI-MEMS device. The implemented contactless actuation principle exploits Lorentz forces exerted on a conductive-non magnetic surface of the sensor, deriving from interaction between the eddy currents and the radial magnetic field, both generated by a sinusoidally driven external inductor. Both excitation and readout strategies are performed remotely via a magnetic strategy; moreover, the conceived sensor has been first numerically studied by using CoventorWare ™ 2008, then the device prototype has been fabricated and a preliminary experimental campaign has been performed to characterize the system in terms of variation of its resonance frequency.

Numerical and experimental investigation on contactless resonant sensors

“…In this section, a brief overview of both the contactless actuation principle and the remote readout strategy is presented; more details can be found in [7][8][9].…”