2005
DOI: 10.1016/j.sna.2004.10.027
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Magnetically bistable actuator

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Cited by 22 publications
(9 citation statements)
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“…must be selected the better sensitivity or the better dynamic range depending on the interest of measurement to made). That must improve some actual sensors [12][13][14] or to open ways for new sensor development.…”
Section: Discussionmentioning
confidence: 99%
“…must be selected the better sensitivity or the better dynamic range depending on the interest of measurement to made). That must improve some actual sensors [12][13][14] or to open ways for new sensor development.…”
Section: Discussionmentioning
confidence: 99%
“…Many simple processes for flip chip assemblies at low costs have been developed (Zhong, 1999, 2001a, b; Wong et al , 2000; Palm et al , 2001; Faheem and Lee, 2004; Gray et al , 2005; Campabadal et al , 2006). There are many options to be selected for a particular application of flip chip technology.…”
Section: Flip Chipmentioning
confidence: 99%
“…For RF MEMS, the large displacement could ensure effective isolation for the signal transformation for operation in the region of 10 GHz as reported in [10]. A variety of MEMS switches, including electrothermal [10], electrostatic [11], and electromagnetic [12,13,14,15,16,17,18,19,20], were reported. The electrothermal microswitch usually tends to respond slowly; as a result, its application is limited.…”
Section: Introductionmentioning
confidence: 99%
“…The electromagnetic microactuator mainly consists of the microcoil and the moving membrane, which were fabricated on different wafers, separately. Then, the permanent magnet, membrane, and microcoil were assembled by bonding or via a manual process [15,16,17,18,19,20]. …”
Section: Introductionmentioning
confidence: 99%