“…3 While previous investigations on FePd films were primarily based on sputter deposition, [4][5][6] which involves deposition energies of some tens of eV, we investigate thermal vapor deposition of FePd thin films in the present study, which allows us to access different phases, microstructures, and stress states. To address the impact of growth conditions on physical properties, thin vapor-deposited Fe 70 Pd 30 films are analyzed with respect to structure, texture, and stress as a function of processing parameters.…”