Two complementary lift‐off approaches for thin films from MgO, based on standard chemicals, are reported. Accompanied by appropriate annealing treatments they can be employed to synthesize freestanding single crystalline Fe‐Pd films in the face centered tetragonal martensitic phase required for miniaturized magnetic shape memory acutation. Generalizations to other materials systems, e.g. epitaxially grown martensitic Ni‐Mn‐Ga magnetic shape memory alloy films, are also demonstrated.
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