Magnetic MEMS: key issues and some applications

Niarchos, D.

doi:10.1016/j.sna.2003.09.010

Cited by 113 publications

(43 citation statements)

References 22 publications

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“…[1][2][3][4] Since relays operate with zero offstate leakage current and abrupt switching characteristics, overcoming the limitation of 60 mV/decade room temperature subthreshold swing for CMOS transistors, they can be used to dramatically lower the energy consumption of digital electronic circuits. 3,4 Several theoretical analyses and experimental works have been performed to design and demonstrate relays driven by piezoelectric, 2 electrostatic, 5 or magnetic forces 6 and to achieve lower operating voltage. 7 As all relays operate on the basic principle of formation and breaking of mechanical contacts, contact adhesion energy plays an important role in determining the performance and energy efficiency of a relay.…”

confidence: 99%

Reducing adhesion energy of micro-relay electrodes by ion beam synthesized oxide nanolayers

et al. 2017

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confidence: 99%

Reducing adhesion energy of micro-relay electrodes by ion beam synthesized oxide nanolayers

et al. 2017

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“…Recently, magnetic micro-electromechanical systems (MEMS) have gained increasing scientific and industrial interests due to their high force and long range application, low power consumption and reversibility [20][21][22][23][24][25][26]. A great deal of research effort has been dedicated to the field of soft magnetic materials for sensor implementation [27][28][29].…”

Section: Introductionmentioning

confidence: 99%

Electrocodeposition of magnetic nickel matrix nanocomposites in a static magnetic field

et al. 2009

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“…Several topical reviews exist [6][7][8]. Coils are economically and technically not viable as a magnetic flux generator in MagMEMS.…”

Section: Introductionmentioning

confidence: 99%

Magnetic switching modes for exchange spring systems with competing anisotropies

Zimmermann

Martin

Bordignon

et al. 2009

Journal of Magnetism and Magnetic Materials

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Hard-soft multilayer a b s t r a c tThe magnetization reversal processes of ½10 nm ErFe 2 =nYFe 2 =4 nm DyFe 2 =nYFe 2 multilayer films with a (11 0) growth axis and a variable YFe 2 layer thickness n are investigated. The magnetically soft YFe 2 compound acts as a separator between the hard rare earth (RE) ErFe 2 and DyFe 2 compounds, each of them bearing different temperature dependent magnetic anisotropy properties. Magnetic measurements of a system with n ¼ 20 nm reveal the existence of three switching modes: an independent switching mode at low temperatures, an ErFe 2 spin flop switching mode at medium high temperatures, and an YFe 2 dominated switching mode at high temperatures. The measurements are in qualitative agreement with the findings of micromagnetic simulations which are used to illustrate the switching modes. Further simulations for a varied YFe 2 layer thickness n ranging from 2 to 40 nm are carried out. Quantitative criteria are defined to classify the reversal behavior, and the resultant switching modes are laid out in a map with regard to n and the temperature T. A new coupled switching mode emerges above a threshold temperature for samples with thin YFe 2 separation layers as a consequence of the exchange coupling between the magnetically hard ErFe 2 and DyFe 2 layers. It reflects the increasing competition of the two conflicting anisotropies to dominate the magnetic switching states of both RE compounds under decreasing n.

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Magnetic MEMS: key issues and some applications

Cited by 113 publications

References 22 publications

Reducing adhesion energy of micro-relay electrodes by ion beam synthesized oxide nanolayers

Reducing adhesion energy of micro-relay electrodes by ion beam synthesized oxide nanolayers

Electrocodeposition of magnetic nickel matrix nanocomposites in a static magnetic field

Magnetic switching modes for exchange spring systems with competing anisotropies

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